Improving Advanced Packaging with Laser Power Measurement

Precision and reliability are paramount in the rapidly evolving world of laser applications in microelectronics packaging. The heat-affected zone (HAZ) is a key consideration in this setting, and it is essential that processes maximize energy absorption where it is required while minimizing the HAZ.

Image Credit: raigvi/Shutterstock.com

Common Laser Processes

Ophir’s laser power meters underpin accurate power measurement, which is key to the effectiveness of these laser processes.

• 5G Antenna Cutting and Drilling: Flexible wireless antennas are manufactured from composites of materials with very different thermal properties, for example, polyimide and copper (Cu). Nanosecond and picosecond lasers must be used to cut and drill multilayer composites while ensuring there is no damage to heat-sensitive layers.
• Optical Debonding: Optical debonding has a number of uses, such as separating OLED displays from a glass support. Ultraviolet and visible nanosecond lasers are employed to separate devices from temporary carriers while preventing mechanical strain, which can lead to cracks.
• Microvia Drilling: Demand for smaller, more densely packed microvias is underpinning the industry’s move from well-established CO₂ lasers to nano- and picosecond UV lasers. These more precise lasers can more effectively reduce the HAZ, enabling small-diameter vias.

Precisely Managing Laser Power

The power of the lasers must be precisely measured and controlled to ensure successful applications, as inaccurate measurements can lead to reduced yields and suboptimal processing.

The ability of ultra-short-pulse lasers to evaporate and cut through many materials poses a significant challenge to achieving accurate and reliable measurements. It is difficult to find power-meter materials and coatings that effectively absorb the laser without damaging the meter itself.

Components such as diffusers, lenses, or beam splitters used to reduce the power on the power meter can also be contaminated or damaged by the ultra-short pulses, especially in the UV. This damage may then lead to skewed measurements.

Ophir’s product portfolio features a range of dedicated solutions for these precise laser applications:

• F80(120)A-CM-17
• F150(200)A-CM-16
• 30(150)A-SV-17

The ‘CM’ and ‘SV’ absorbers represent some of the most robust materials available, meaning they can be employed with nanosecond, picosecond, and even femtosecond lasers.

Conclusion

Ophir’s laser power meters provide the reliability, accuracy, and versatility needed to ensure that laser-based processes in advanced packaging applications are optimized for maximum yield and efficiency.

Manufacturers working with Ophir can be confident that they are employing the best tools available to measure and control their laser systems.

Acknowledgments

Produced from materials originally authored by Dr. Efi Rotem from Ophir Photonic Group.

This information has been sourced, reviewed, and adapted from materials provided by MKS Ophir.

For more information on this source, please visit MKS Ophir.