The LEXT OLS5100 laser confocal microscope, designed for failure analysis and material engineering research, combines high measurement precision and optical performance with clever features that make the microscope simple to use. The LEXT OLS5100 enables users to quickly and effectively assess form and surface roughness at the submicron level to streamline the process and provide reliable results.
Easier Material Engineering and Failure Analysis Experiments
By automating formerly time-consuming activities, the Smart Experiment Manager makes the workflows for submicron 3D observation and failure analysis experiments easier.
- Clear data trend visualization tools
- Automatically creates experiment plan
- Data is automatically added to the experiment design matrix, lowering the possibility of input mistakes
Guaranteed Measurement Accuracy
The measurement data produced by LEXT microscope objectives is extremely accurate. When used in conjunction with the Smart Lens Advisor, users can get reliable, accurate data.
- The user is assisted by the Smart Lens Advisor in selecting the appropriate objective lens for their roughness measurements.
- Guaranteed measurement accuracy.
- Reputable Olympus optics minimize aberration to record the sample’s correct form over the complete field of view.
Image Credit: Evident Corporation – Industrial Microscopy
Easy Laser Scanning Microscopy
Both new and experienced users will find it easy to use the microscope owing to the thoughtfully designed software.
- Set the sample on the stage, then click the start button to promptly and easily collect precise data.
- Guaranteed measurement performance based on the operational environment.
Specifications
Main Unit
Table 1. Source: Evident Corporation – Industrial Microscopy
| Model |
OLS5100-SAF |
OLS5100-SMF |
OLS5100-LAF |
OLS5100-EAF |
| Total magnification |
54x–17,280x |
| Field of view |
16 µm–5,120 µm |
| Measurement principle |
Optical system |
Reflection-type confocal laser scanning laser microscope
Reflection-type confocal laser scanning laser-DIC microscope
Color
Color-DIC |
| Light receiving element |
Laser: Photomultiplier (2 channels)
Color: CMOS color camera |
| Height measurement |
Display resolution |
0.5 nm |
| Dynamic range |
16 bits |
| Repeatability σn-1*1 *2 *5 |
5X: 0.45 µm, 10X: 0.1 µm, 20X: 0.03 µm, 50X : 0.012 µm, 100X : 0.012 µm |
| Accuracy *1 *3 *5 |
0.15+L/100 µm (L:Measuring length[µm]) |
| Accuracy for stitched image *1 *3 *5 |
10X: 5.0+L/100 µm, 20X or higher: 1.0+L/100 µm (L: Stitching length [µm]) |
| Measurement noise (Sq noise) *1 *4 *5 |
1 nm (Type) |
| Width measurement |
Display resolution |
1 nm |
| Repeatability 3σn-1 *1 *2 *5 |
5X: 0.4 µm, 10X: 0.2 µm, 20X: 0.05 µm, 50X: 0.04 µm, 100X: 0.02 µm |
| Accuracy *1 *3 *5 |
Measurement value +/- 1.5% |
| Accuracy for stitched image *1 *3 *5 |
10X: 24+0.5L µm, 20X: 15+0.5L µm, 50X: 9+0.5L µm, 100X: 7+0.5L µm (L: Stitching length [mm]) |
| Maximum number of measuring points in a single measurement |
4096 × 4096 pixels |
| Maximum number of measuring points |
36-megapixels |
| XY stage configuration |
Length measurement module |
• |
NA |
NA |
• |
| Operating range |
100 × 100 mm (3.9 × 3.9 in.) Motorized |
100 × 100 mm (3.9 × 3.9 in.) Manual |
300 × 300 mm (11.8 × 11.8 in.) Motorized |
100 × 100 mm (3.9 × 3.9 in.) Motorized |
| Maximum sample height |
100 × 100 mm (3.9 × 3.9 in.) |
30 mm (1.2 in.) |
30 mm (1.2 in.) |
210 mm (8.3 in.) |
| Laser light source |
Wavelength |
405 nm |
| Maximum output |
0.95 mW |
| Laser class |
Class 2 (IEC60825-1:2007, IEC60825-1:2014) |
| Color light source |
White LED |
| Electrical power |
240 W |
240 W |
278 W |
240 W |
| Mass |
Microscope body |
Approx. 31 kg (68.3 lb) |
Approx. 32 kg (70.5 lb) |
Approx. 50 kg (110.2 lb) |
Approx. 43 kg (94.8 lb) |
| Control box |
Approx. 12 kg (26.5 lb) |
*1 Guaranteed when used in constant temperature and constant-temperature environment (temperature: 20 ˚C ± 1˚ C, humidity: 50% ± 10%) specified in ISO554(1976), JIS Z-8703(1983).
*2 For 20× or higher, when measured with MPLAPON LEXT series objectives.
*3 When measured with dedicated LEXT objective.
*4 Typical value when measured with MPLAPON100XLEXT objective, and may differ from the guaranteed value.
*5 Guaranteed under Olympus Certificate System.
** The OS license of Windows 10 has been certified for the microscope controller provided by Olympus. Therefore, Microsoft’s license terms are applied and users agree to the terms.
Objectives
Table 2. Source: Evident Corporation – Industrial Microscopy
| Series |
Model |
Numerical Aperture (NA) |
Working Distance (WD) (mm) |
| UIS2 objective lens |
MPLFLN2.5x |
0.08 |
10.7 |
| MPLFLN5x |
0.15 |
20 |
| Dedicated LEXT objective lens (10X) |
MPLFLN10xLEXT |
0.3 |
10.4 |
| Dedicated LEXT objective lens (high-performance type) |
MPLAPON20xLEXT |
0.6 |
1 |
| MPLAPON50xLEXT |
0.95 |
0.35 |
| MPLAPON100xLEXT |
0.95 |
0.35 |
| Dedicated LEXT objective lens (long working distance type) |
LMPLFLN20xLEXT |
0.45 |
6.5 |
| LMPLFLN50xLEXT |
0.6 |
5.2 |
| LMPLFLN100xLEXT |
0.8 |
3.4 |
| Super long working distance lens |
SLMPLN20x |
0.25 |
25 |
| SLMPLN50x |
0.35 |
18 |
| SLMPLN100x |
0.6 |
7.6 |
| Long working distance for LCD lens |
LCPLFLN20xLCD |
0.45 |
8.3-7.4 |
| LCPLFLN50xLCD |
0.7 |
3.0-2.2 |
| LCPLFLN100xLCD |
0.85 |
1.2-0.9 |
Application Software
Table 3. Source: Evident Corporation – Industrial Microscopy
| . |
. |
. |
| Standard software |
OLS51-BSW |
| Data acquisition app |
Analysis app (simple analysis) |
| Motorized stage package application*1 |
OLS50-S-MSP |
| Advanced analysis application*2 |
OLS50-S-AA |
| Film thickness measurement application |
OLS50-S-FT |
| Auto edge measurement application |
OLS50-S-ED |
| Particle analysis application |
OLS50-S-PA |
| Experimental total assist application |
OLS51-S-ETA |
| Sphere/cylinder surface angle analysis application |
OLS50-S-SA |
*1 Including auto-stitching data acquisition and multi-area data acquisition functions.
*2 Including Profile analysis, Difference analysis, Step-height analysis, Surface analysis, Area/volume analysis, Line roughness analysis, Area roughness analysis, and Histogram analysis.
Evident' LEXT OLS4100
Razor with an Acute Angle
LEXT-Dedicated Objectives
Minimized Aberrations with Dedicated Objective
STEP Height standard Type B, PTB-5, Institut für Mikroelektronik, Germany, 6 nm Detection in Height Measurement
Diamond Electroplated Tool Objective Lens MPlanApoN50xLEXT
Observation_Measurement of Multiple Layers of Transparent Material
Accuracy and Repeatability
Surface Roughness Measurement
Particle Measurement (optional)
Film Thickness Measurement (optional)
Auto Edge Detection_Measurement (optional)