Posted in | Laser Marking

LEXT OLS5100 3D Laser Scanning Microscope from Evident

The LEXT OLS5100 laser confocal microscope, designed for failure analysis and material engineering research, combines high measurement precision and optical performance with clever features that make the microscope simple to use. The LEXT OLS5100 enables users to quickly and effectively assess form and surface roughness at the submicron level to streamline the process and provide reliable results.

Easier Material Engineering and Failure Analysis Experiments

By automating formerly time-consuming activities, the Smart Experiment Manager makes the workflows for submicron 3D observation and failure analysis experiments easier.

  • Clear data trend visualization tools
  • Automatically creates experiment plan
  • Data is automatically added to the experiment design matrix, lowering the possibility of input mistakes

Guaranteed Measurement Accuracy

The measurement data produced by LEXT microscope objectives is extremely accurate. When used in conjunction with the Smart Lens Advisor, users can get reliable, accurate data.

  • The user is assisted by the Smart Lens Advisor in selecting the appropriate objective lens for their roughness measurements.
  • Guaranteed measurement accuracy.
  • Reputable Olympus optics minimize aberration to record the sample’s correct form over the complete field of view.

LEXT OLS5100 3D Laser Scanning Microscope from Evident

Image Credit: Evident Corporation – Industrial Microscopy

Easy Laser Scanning Microscopy

Both new and experienced users will find it easy to use the microscope owing to the thoughtfully designed software.

  • Set the sample on the stage, then click the start button to promptly and easily collect precise data.
  • Guaranteed measurement performance based on the operational environment.


Main Unit

Table 1. Source: Evident Corporation – Industrial Microscopy

Model OLS5100-SAF OLS5100-SMF OLS5100-LAF OLS5100-EAF
Total magnification 54x–17,280x
Field of view 16 µm–5,120 µm
Measurement principle Optical system Reflection-type confocal laser scanning laser microscope
Reflection-type confocal laser scanning laser-DIC microscope
Light receiving element Laser: Photomultiplier (2 channels)
Color: CMOS color camera
Height measurement Display resolution 0.5 nm
Dynamic range 16 bits
Repeatability σn-1*1 *2 *5 5X: 0.45 µm, 10X: 0.1 µm, 20X: 0.03 µm, 50X : 0.012 µm, 100X : 0.012 µm
Accuracy *1 *3 *5 0.15+L/100 µm (L:Measuring length[µm])
Accuracy for stitched image *1 *3 *5 10X: 5.0+L/100 µm, 20X or higher: 1.0+L/100 µm (L: Stitching length [µm])
Measurement noise (Sq noise) *1 *4 *5 1 nm (Type)
Width measurement Display resolution 1 nm
Repeatability 3σn-1  *1 *2 *5 5X: 0.4 µm, 10X: 0.2 µm, 20X: 0.05 µm, 50X: 0.04 µm, 100X: 0.02 µm
Accuracy *1 *3 *5 Measurement value +/- 1.5%
Accuracy for stitched image *1 *3 *5 10X: 24+0.5L µm, 20X: 15+0.5L µm, 50X: 9+0.5L µm, 100X: 7+0.5L µm (L: Stitching length [mm])
Maximum number of measuring points in a single measurement 4096 × 4096 pixels
Maximum number of measuring points 36-megapixels
XY stage configuration Length measurement module NA NA
Operating range 100 × 100 mm (3.9 × 3.9 in.) Motorized 100 × 100 mm (3.9 × 3.9 in.) Manual 300 × 300 mm (11.8 × 11.8 in.) Motorized 100 × 100 mm (3.9 × 3.9 in.) Motorized
Maximum sample height 100 × 100 mm (3.9 × 3.9 in.) 30 mm (1.2 in.) 30 mm (1.2 in.) 210 mm (8.3 in.)
Laser light source Wavelength 405 nm
Maximum output 0.95 mW
Laser class Class 2 (IEC60825-1:2007, IEC60825-1:2014)
Color light source White LED
Electrical power 240 W 240 W 278 W 240 W
Mass Microscope body Approx. 31 kg (68.3 lb) Approx. 32 kg (70.5 lb) Approx. 50 kg (110.2 lb) Approx. 43 kg (94.8 lb)
Control box Approx. 12 kg (26.5 lb)


*1 Guaranteed when used in constant temperature and constant-temperature environment (temperature: 20 ˚C ± 1˚ C, humidity: 50% ± 10%) specified in ISO554(1976), JIS Z-8703(1983).

*2 For 20× or higher, when measured with MPLAPON LEXT series objectives.

*3 When measured with dedicated LEXT objective.

*4 Typical value when measured with MPLAPON100XLEXT objective, and may differ from the guaranteed value.

*5 Guaranteed under Olympus Certificate System.

** The OS license of Windows 10 has been certified for the microscope controller provided by Olympus. Therefore, Microsoft’s license terms are applied and users agree to the terms.


Table 2. Source: Evident Corporation – Industrial Microscopy

Series Model Numerical Aperture (NA) Working Distance (WD) (mm)
UIS2 objective lens MPLFLN2.5x 0.08 10.7
MPLFLN5x 0.15 20
Dedicated LEXT objective lens (10X) MPLFLN10xLEXT 0.3 10.4
Dedicated LEXT objective lens (high-performance type) MPLAPON20xLEXT 0.6 1
MPLAPON50xLEXT 0.95 0.35
MPLAPON100xLEXT 0.95 0.35
Dedicated LEXT objective lens (long working distance type) LMPLFLN20xLEXT 0.45 6.5
LMPLFLN50xLEXT 0.6 5.2
LMPLFLN100xLEXT 0.8 3.4
Super long working distance lens SLMPLN20x 0.25 25
SLMPLN50x 0.35 18
SLMPLN100x 0.6 7.6
Long working distance for LCD lens LCPLFLN20xLCD 0.45 8.3-7.4
LCPLFLN50xLCD 0.7 3.0-2.2
LCPLFLN100xLCD 0.85 1.2-0.9


Application Software

Table 3. Source: Evident Corporation – Industrial Microscopy

. . .
Standard software OLS51-BSW
Data acquisition app Analysis app (simple analysis)
Motorized stage package application*1 OLS50-S-MSP
Advanced analysis application*2 OLS50-S-AA
Film thickness measurement application OLS50-S-FT
Auto edge measurement application OLS50-S-ED
Particle analysis application OLS50-S-PA
Experimental total assist application OLS51-S-ETA
Sphere/cylinder surface angle analysis application OLS50-S-SA


*1 Including auto-stitching data acquisition and multi-area data acquisition functions.

*2 Including Profile analysis, Difference analysis, Step-height analysis, Surface analysis, Area/volume analysis, Line roughness analysis, Area roughness analysis, and Histogram analysis.

Evident' LEXT OLS4100

Razor with an Acute Angle
LEXT-Dedicated Objectives
Minimized Aberrations with Dedicated Objective
STEP Height standard Type B, PTB-5, Institut für Mikroelektronik, Germany, 6 nm Detection in Height Measurement
Diamond Electroplated Tool Objective Lens MPlanApoN50xLEXT
Multi-Layer Mode
Observation_Measurement of Multiple Layers of Transparent Material
Accuracy and Repeatability
Traceability System
Step Measurement
Surface Roughness Measurement
Area_Volume Measurement
Particle Measurement (optional)
Geometric Measurement
Film Thickness Measurement (optional)
Auto Edge Detection_Measurement (optional)
Micro Roughness1
Micro Roughness2
Polymer Film 3D image
Soft Specimen
Adhesive Specimen
Bonding Wires1
Bonding Wires2

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