Posted in | Energy | Materials Analysis

Hiden Introduce a Compact SIMS Facility Mounted into a UHV Flange

Hiden Analytical announce the introduction of a complete, compact SIMS facility conveniently mounted on a single UHV Conflat-type flange. The new system, aptly named SIMS-on-a-Flange, allows users to quickly install a complete SIMS resource on existing vacuum and process chambers with no major reconstruction or alignment issues.

SIMS (Secondary Ion Mass Spectrometry) is a high sensitivity surface analysis technique for the determination of surface composition, for contaminant analysis, and for depth profiling in the uppermost surface layers of a sample. Applied to analyses extending from a few Angstroms up to a micron in depth, surfaces are analysed by species and by abundance, layer by atomic layer.

The system comprises the analytical-grade quadrupole mass spectrometer with integral energy filter, the fine-focus oxygen gas-sourced ion gun, and all necessary software and hardware for system operation, for ion beam raster scanning, for data presentation and for surface mapping.

Mass range options enable operation from 1 amu to 1000 amu, with ion counting detection of both positively and negatively charged ions. Standard mounting flanges are DN-150-CF (6-inch port size) and DN-200-CF (8-inch port size) dependent on options.

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