HORIBA Scientific (HORIBA), global leader in Glow Discharge Optical Emission Spectrometry (GDOES), announces a new patented process for fast sputtering of polymers and polymeric containing layers by glow discharge spectrometry.
In Glow Discharge, the material of interest is sputtered using pulsed Radio Frequency plasma; the sputtered species are excited by the same plasma and simultaneously measured in real time with a spectrometer providing elemental composition depth profiles.
The analytical benefits of the new development, first presented in 2012 at HORIBA’s international GD Day, include not only a gain in speed, but also a parallel gain in sensitivity. It also offers fast access to embedded interfaces located below a thick organic layer.
Applications range from automotive organic layers to encapsulated PV cells, and even DVDs. In the last example, nanometre depth resolution was demonstrated below a top layer of 70 microns thickness.
About HORIBA
Founded in 1953, HORIBA has explored a wide range of unique measurement and analysis technologies to meet global customer needs from 47 group companies and local sites spread across 28 countries and regions. Under the corporate motto Joy and Fun, the company has expanded and refined its core tech-nologies to solve society’s energy issues of today and tomorrow. Our unique measurement and analysis technologies are valued in various fields of society including the three megatrend business fields of Ener-gy & Environment, Biology & Healthcare and Materials & Semiconductor. For more information on HORIBA, visit https://www.horiba.com/int/company/about-horiba/home/