Oxford Instruments PlasmaPro® Systems Ordered by Chinese HB-LED Manufacturer

High tech Chinese manufacturer, Enraytek Optoelectronics Co has recently ordered several leading edge Oxford Instruments PlasmaPro 800 PECVD systems for the manufacture of their High Brightness LEDs.

Enraytek’s key products are High Brightness LEDs for TV backlighting and LED lighting, with manufacturing capability covering all aspects from sapphire substrate materials, epitaxial wafers, and chips for packaging and testing.

Oxford Instruments’ large capacity, open loading PlasmaPro 800 PECVD systems are industry proven for HBLED processes, allowing up to 300mm wafers, and are designed to produce the high quality and uniform dielectric films needed in LED manufacture. The PlasmaPro's small footprint, and excellent substrate temperature control allows high performance processes and precise process control. The large electrode delivers the market leading cost of ownership demanded by the LED industry.

Says Mr.Xu Chunchao. Vice President from Enraytek, “As one of China’s foremost LED design and manufacturing companies, cost efficient and state-of-the-art processing equipment is key for Enraytek.  We chose Oxford Instruments systems following a rigorous selection process, as they could offer us the advanced technology, support and cost of ownership we require.”  

“Oxford Instruments manufactures the very high specification plasma deposition technology required by the LED industry”, comments Dr David Haynes, Sales and Marketing Director at Oxford Instruments Plasma Technology, “With an already established installed base in Chinese LED companies, we are delighted that Enraytek has also chosen us as their supplier of a number of PlasmaPro 800 systems. We back up our installations with a comprehensive ongoing customer support.”

About Oxford Instruments plc

Oxford Instruments designs, supplies and supports high-technology tools and systems with a focus on research and industrial applications. Innovation has been the driving force behind Oxford Instruments' growth and success for over 50 years, and its strategy is to effect the successful commercialisation of these ideas by bringing them to market in a timely and customer-focused fashion.

The first technology business to be spun out from Oxford University, Oxford Instruments is now a global company with over 2300 staff worldwide and is listed on the FTSE250 index of the London Stock Exchange (OXIG).  Its objective is to be the leading provider of new generation tools and systems for the research and industrial sectors with a focus on nanotechnology. Its key market sectors include nano-fabrication and nano-materials. The company’s strategy is to expand the business into the life sciences arena, where nanotechnology and biotechnology intersect

This involves the combination of core technologies in areas such as low temperature, high magnetic field and ultra high vacuum environments; Nuclear Magnetic Resonance; x-ray, electron, laser and optical based metrology; atomic force microscopy; optical imaging; advanced growth, deposition and etching.

Oxford Instruments aims to pursue responsible development and deeper understanding of our world through science and technology. Its products, expertise, and ideas address global issues such as energy, environment, security and health.

About Oxford Instruments Plasma Technology

Oxford Instruments Plasma Technology offers flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable engineering of micro- and nano-structures. Our systems provide process solutions for the etching of nanometre sized features, nanolayer deposition and the controlled growth of nanostructures.

These solutions are based on core technologies in plasma-enhanced deposition and etch, ion-beam deposition and etch, atomic layer deposition, deep silicon etch and physical vapour deposition. Products range from compact stand-alone systems for R&D, through batch tools and up to clustered cassette-to-cassette platforms for high-throughput production processing.


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