Tiger Optics, a US manufacturer of laser-based gas analyzers, has unveiled a new line of Cavity Ring-Down Spectroscopy (CRDS) analyzers based on mid-infrared Quantum Cascade Laser (QCL) technology.
Part of the company’s new HALO Max WCL product line, the analyzers enable real-time, parts-per-trillion (ppt)-level detection of trace contaminants, including carbon monoxide (CO) and carbon dioxide (CO2), in ultra-high purity (UHP) gases typically used in semiconductor manufacturing.
Sharing details of the launch, Tiger Optics said the new HALO Max QCL expands on its existing product portfolio to include detection capabilities for H2O, O2, CH4, and CO and CO2, offering customers a more complete solution.
“Tiger Optics is excited to launch this first-of-a-kind analyzer incorporating the most advanced laser technology in the market,” said Jim Belanger, Vice-President, Sales and Marketing for Tiger Optics & Extrel.
“We worked in close coordination with key semiconductor and industrial gas customers to ensure we addressed their requirements for real-time, continuous UHP gas analysis.”
“The HALO Max QCL for the measurement of critical impurities such as CO and CO2in the main semiconductor bulk process gases sets a new standard for on-line continuous UHP gas analysis.”
Source: https://www.gasworld.com/