XFlash® FlatQUAD 2L is a unique, pioneering energy-dispersive X-ray Spectroscopy (EDS) detector, with an annular four-channel configuration that enhances signal collection to tackle challenging EDS applications.
The new and updated detector design boasts a larger central aperture, facilitating concurrent BSE imaging, all while maintaining exceptional output count rates of 4,000,000 cps.
XFlash® FlatQUAD 2L: Making Difficult EDS Easy
- Conduct SEM EDS at ultra-high resolutions reaching the nanometer scale
- Quantify elemental compositions at ultra-high throughputs
- Correlate EDS signals with BSE images, collected concurrently
- Examine elements in sensitive or charging samples
- Precisely map the elemental composition of topographic samples
- Perform TEM-like EDS using an SEM
- Function in both low-vacuum and high-vacuum modes
The XFlash® FlatQUAD 2L is a unique four-channel annular detector that sits between the sample and SEM pole piece to maximize EDS signal collection whilst enabling simultaneous BSE imaging. Image Credit: Bruker Nano GmbH – Electron Microscope Analyzers
Unique Annular Design
A Unique Detector Design for Industry-Leading Performance
Schematic showing how the primary electron beam of the SEM passes through the opening in the center of the XFlash® FlatQUAD 2L. The X-ray signal emitted from the sample (magenta) is collected by the four SDD segments surrounding this opening, maximizing the solid angle and collection efficiency, whilst backscattered electrons (blue) pass back through to the SEM pole piece for BSE imaging. Image Credit: Bruker Nano GmbH – Electron Microscope Analyzers
The distinctive and patented configuration of the XFlash FlatQUAD 2L detector provides unmatched performance in both quantitative and qualitative EDS analysis.
XFlash® FlatQUAD 2L features a distinctive design, comprising four silicon drift detector (SDD) segments with a total area of 100 mm2, arranged in an annular configuration around a central aperture.
This detector is placed between the SEM pole piece and the sample, with the central aperture facilitating the unobstructed passage of the primary electron beam.
Such a configuration greatly enhances the solid angle and, as a result, the efficiency of X-ray collection when compared to traditional EDS detector designs. Furthermore, the aperture enables the effective collection of backscattered electrons by the SEM’s BSE detectors, enabling true parallel signal acquisition.
To accommodate various SEM models, the XFlash® FlatQUAD 2L can be accurately positioned in the X, Y, and Z axes.