Ultrahigh Resolution Field Emission SEM - JSM-IT800

The JSM-IT800 Ultrahigh Resolution Field Emission SEM from JEOL is a groundbreaking FE-SEM equipped with the most sophisticated high-resolution analytical technology available today.

A new level of analytical intelligence is provided by the JEOL IT800 series for high spatial resolution imaging and analysis at the nanoscale.

Smart, Flexible, and Powerful


Equipped with built-in JEOL Energy Dispersive X-ray (EDS), the IT800 series of Schottky Field Emission SEMs simplifies workflow efficiency and operation. Powerful software, ultrahigh-resolution, and elegant functionality help acquire data, right from observation to elemental analysis and subsequent reporting in a smooth manner.

The JEOL NEOENGINE® electron beam control system as well as the latest auto functions allows rapid transitions between high current analyses and high-resolution imaging, without affecting the performance and thus leading to unparalleled ease of use.

Sophisticated AI algorithms have been developed to correct electron trajectories, improve the control of electron lenses in real time, and automatically align the beam, while rectifying astigmatism, focus, contrast, and brightness. With live EDS analysis, the chemical composition of specimens can be directly monitored at the time of imaging.

The JEOL SEM smoothly incorporates navigation and optical imaging, EDS Live Analysis, and SEM imaging with just a one-click operation.


The JSM-IT800 series is fitted with a huge specimen chamber that houses an extensive range of detectors at the same time. These detectors include multiple EDS, CL, BSE, STEM, and WDS. The exclusive soft X-ray emission Spectrometer from JEOL enables parallel and efficient collection of extremely low-energy X-rays while offering unparalleled chemical state analysis.


The IT800SHL—JEOL’s flagship FE SEM with sub-nm resolution—offers an accelerating voltage range from 0.01 to 30 kV and a magnification of up to 2,000,000X, allowing users to achieve incredible details of nanostructures along with detailed elemental analysis. This user-friendly and highly versatile field emission SEM provides the next level of analytical intelligence in FE-SEM.

High Spatial Resolution

The JSM-IT800 makes use of a hybrid objective lens that integrates electrostatic and electromagnetic lenses with through-the-lens electron detection system. Since no electromagnetic leakage occurs beneath the lens, the JSM-IT800 is perfect for analyzing samples and imaging magnetic materials with EBSD.

The incorporation of in-the-lens deceleration and acceleration of the electron beam helps reduce the impacts of lens aberrations at low kV, providing higher resolution at the lowest accelerating voltages.

The latest Upper Hybrid Detector (UHD) is unique to the SHL version and offers exceptional S/N and detection efficiency of electrons released by the specimen, without any specimen bias.

The JSM-IT800 uses a beam deceleration mode, or BD mode, to reduce charging at the time of imaging of nonconductive specimens. It also enhances resolution at low kV and improves surface topography by enabling accelerating voltages down to 0.01 kV.

The integration of JEOL’s specific in-lens field emission gun enables a beam current of up to 500 nA. This current can be delivered to the sample and also to the aperture angle control lens (ACL) that improves massive probe currents into the tiniest probe diameter. These features make this microscope well suited for both the analysis and imaging of nanostructures.

New BSE Detectors for Increased Sensitivity

Besides the solid-state BSE detectors (BED), a versatile multi-segmented (VBED) and a scintillator (SBED) detector are also available to improve signal selection, sensitivity, and response from various detection angles and build 3D images of the sample.

JSM-IT800 Field Emission SEM Details

Key Features

  • NEOENGINE–smart automated electron beam control
  • Multipurpose electrostatic and electromagnetic hybrid lens design delivers excellent imaging and analysis performance
  • Aperture angle control lens (ACL) offers superior resolution at any kV or probe current
  • Includes the latest auto functions such as stigmation, focus, and beam alignment
  • In-lens field emission gun is available
  • Huge specimen chamber equipped with numerous ports
  • Beam deceleration (BD) mode decreases the impact of lens aberrations in the sample
  • High spatial resolution imaging and analysis of nanostructures
  • Smile view lab for report generation and data management
  • Offers elemental maps and montage images
  • Live analysis with incorporated JEOL EDS elemental screening


JEOL JSM-IT800 Schottky Field Emission Scanning Electron Microscope

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