To aid in TEM specimen preparation, the JIB-PS500i offers three solutions. From specimen preparation to TEM observation, a high throughput workflow is guaranteed.
Features
![JIB-PS500i FIB-SEM System for TEM Specimen Preparation](https://d12oja0ew7x0i8.cloudfront.net/images/equipments/EquipmentImage_8525_16797307795396817.jpg)
Image Credit: JEOL USA, Inc
TEM-Linkage
The link between the TEM and the FIB is enabled through the application of a double tilt cartridge and TEM holder* from JEOL. The cartridge can be fixed to the exclusive TEM specimen holder with just a single touch.
![Specimen transfer workflow with the double tilt cartridge*.](https://d12oja0ew7x0i8.cloudfront.net/images/equipments/EquipmentImage_8525_16797308034611364.jpg)
Specimen transfer workflow with the double tilt cartridge*. Image Credit: JEOL USA, Inc
![OmniProbe 400*.](https://d12oja0ew7x0i8.cloudfront.net/images/equipments/EquipmentImage_8525_16797308124014770.jpg)
OmniProbe 400*. Image Credit: JEOL USA, Inc
![Specimen: 5 nm design rule semiconductor device (FinFET) Observation conditions: (Left) Accelerating voltage 2 kV, Detector SED Secondary electron image, (center and right) Accelerating voltage 200 kV, TEM image, Instrument: JEM-ARM200F.](https://d12oja0ew7x0i8.cloudfront.net/images/equipments/EquipmentImage_8525_16797308204451557.jpg)
Specimen: 5 nm design rule semiconductor device (FinFET) Observation conditions: (Left) Accelerating voltage 2 kV, Detector SED Secondary electron image, (center and right) Accelerating voltage 200 kV, TEM image, Instrument: JEM-ARM200F. Image Credit: JEOL USA, Inc
The adopted OmniProbe 400* (Oxford Instruments) facilitates accurate and seamless manipulations and pick-up operations. The functions of the OmniProbe 400* are incorporated into the JIB-PS500i’s software.
Check-and-Go
To precisely and efficiently prepare a TEM specimen, it is essential to check in on the preparation progress. Using its high-tilt stage and detector scheme, the JIB-PS500i enables a smooth transition from FIB milling to scanning transmission electron microscope (STEM) imaging. Quick transitions from lamella processing to STEM imaging result in successful specimen preparation.
![JIB-PS500i FIB-SEM System for TEM Specimen Preparation](https://d12oja0ew7x0i8.cloudfront.net/images/equipments/EquipmentImage_8525_16797309108846060.jpg)
Image Credit: JEOL USA, Inc
![Specimen: SiC power semiconductor device Observation conditions: Accelerating voltage 30 kV, Detector (Upper left) STEM-BF, (Upper right) STEM-DF, (Lower left) SED Secondary electron image, (Lower right) EDS maps Purple: Al Yellow: Ti Orange: P Blue: O Green: Si. I](https://d12oja0ew7x0i8.cloudfront.net/images/equipments/EquipmentImage_8525_16797309190675144.jpg)
Specimen: SiC power semiconductor device Observation conditions: Accelerating voltage 30 kV, Detector (Upper left) STEM-BF, (Upper right) STEM-DF, (Lower left) SED Secondary electron image, (Lower right) EDS maps Purple: Al Yellow: Ti Orange: P Blue: O Green: Si. Image Credit: JEOL USA, Inc
![](https://d12oja0ew7x0i8.cloudfront.net/images/equipments/EquipmentImage_8525_450833073712152766666.jpg)
JIB-PS500i Focused Ion Beam FIB-SEM