Structured Materials Industries Receives Order for Ultra-High Temperature Oxide MOCVD Tool for Oxide Films

Structured Materials Industries, announced today that it had received an order for an ultra-high temperature oxide MOCVD tool to grow oxide films well in excess of 1200°C. Very high temperatures are needed to realize certain crystalline properties of many oxide materials.

By developing a high temperature system, new levels of materials growth capability will be achieved and hence new material results are hoped to be realized. Many materials require high temperatures to allow the growth of specific crystalline phases. The uniquely achievable high temperatures also allow the system to uniquely pre-treat samples by degassing, oxygen treating, or even annealing the substrate.

“This project will create a tool for oxide film growers unique to the industry. The ability to access new material phases and to study and implement them will have a dramatic impact on our understanding of the kinetics of high temperature CVD growth of oxides, of how previously unachievable advanced oxide films behave, and, ultimately, how devices made using these advanced films behave,” says SMI CEO and President, Dr. Gary S. Tompa.

Posted May 5th,2008