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Oxford Instruments Omicron NanoScience Complete Commissioning of Deposition and Analysis Cluster Tool

Oxford Instruments Omicron NanoScience has recently completed the commissioning of a state-of-the-art multi-technique deposition and analysis cluster tool at the Institute for Quantum Computing (IQC), University of Waterloo, Canada.

This system features a multi-chamber design to grow and analyse new, high quality, thin film and layered structure materials under ultra-high vacuum conditions. The materials are being considered for implementation in the next generation of solid-state quantum computers and quantum information processors.

The cluster system provides MBE (molecular beam epitaxy) and UHV sputtering methods on multiple materials within the same device, ranging from metals and metal oxides to superconductors and topological insulators, but further offers XPS (X-ray photoelectron spectroscopy) analysis of samples via Oxford Instruments’ ARGUS analyser. By being integrated within a single UHV cluster tool, such in-process analysis enables layer-by-layer quality control of the MBE and sputtering growth processes.

Cluster tool courtesy of the Institute for Quantum Computing, University of Waterloo, Canada.

Professor David Cory, Canada Excellence Research Chair and Deputy Director, Research at IQC in Quantum Information Processing, said: “The new MBE cluster tool is the centre piece of our new lab and is the result of an intensive collaboration with Oxford Instruments. It offers a unique capability which we hope will provide a new direction for the development of quantum materials for use in a next generation technology.”

Dr Michael Cuthbert, NPI director at Oxford Instruments Omicron Nanoscience, commented: “The delivery of this state-of-the-art system demonstrates our commitment to support the quantum computing community in their race to build quantum computers. Our unique offering, ranging from fabrication to analysis and characterisation, allows us to partner with the most prestigious institutes and provide the technologies to develop science which could improve our lives in many ways. For instance, quantum computers have applications in such diverse areas as drug discovery, cybersecurity, logistics and so on.”

About Oxford Instruments plc

Oxford Instruments designs, supplies and supports high-technology tools and systems with a focus on research and industrial applications. It provides solutions needed to advance fundamental physics research and its transfer into commercial nanotechnology applications. Innovation has been the driving force behind Oxford Instruments' growth and success for over 50 years, and its strategy is to effect the successful commercialisation of these ideas by bringing them to market in a timely and customer-focused fashion.

The first technology business to be spun out from Oxford University over fifty years ago, Oxford Instruments is now a global company with over 2000 staff worldwide and is listed on the FTSE250 index of the London Stock Exchange (OXIG).  Its objective is to be the leading provider of new generation tools and systems for the research and industrial sectors.

This involves the combination of core technologies in areas such as low temperature, high magnetic field and ultra high vacuum environments, Nuclear Magnetic Resonance, X-ray, electron and optical based metrology, and advanced growth, deposition and etching.

Oxford Instruments aims to pursue responsible development and deeper understanding of our world through science and technology. Its products, expertise, and ideas address global issues such as energy, environment, security and health.  

About Oxford Instruments Omicron NanoScience

Internationally recognised as world leaders in scanning probe microscopy, electron spectrscopy, superconductivity, ultra low temperature cryogenic environments, Oxford Instruments Omicron NanoScience is driving innovation in these fields. The company’s leading-edge technologies support research in nanotechnology, solid state and condensed matter physics.

Combining outstanding technical expertise, original thinking and a commitment to meeting customers’ needs, Oxford Instruments Omicron NanoScience enables real advances both in research and commercial applications by providing the high quality technological environments needed to meet demanding experimental requirements. Oxford Instruments Omicron NanoScience is part of the Oxford Instruments plc group.

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