EDS in the TEM: Fundamentals and Principles
While the vast majority of Energy Dispersive X-ray Spectroscopy (EDS) systems are mounted on Scanning Electron Microscopes (SEM), the incorporation of an EDS system on a Transmission Electron Microscopes (TEM) gives access to the same wealth of compositional information but on a scale much smaller than what is achievable in the SEM.
However, the TEM poses a very different set of challenges both from a hardware and analytical point of view compared to the SEM. In this webinar, we go through the fundamentals of X-ray generation, detection, and analysis in the TEM with a focus on the challenges that are unique to the TEM. This includes holder influence, geometry optimization, quantification and correction routines as well as performance metrics such as Fiori number and artefact peaks.