Plasma Research with Probes and Mass Spectrometers

The field of plasma research is still in its infancy, but there are already some devices being produced that make use of this powerful technique. Hiden Analytical manufacture plasma analyzers that examine the charged particles of matter and the resulting ionization, along with the ionization as a result of bombardment by high powered lasers. These devices can provide insight into plasma with real-time characterization, with minimal perturbation and a variety of energy and mass capacities.

As well as this Hiden Analytical have over 30 years’ experience in the development and production of a range of probes and mass spectrometers, which can be used alongside their plasma equipment to provide detailed diagnostic information and analytics.

Plasma has broadened its application in a range of engineering and processing techniques. These include an array of applications, from etching semiconductors to materials coatings and surface treatment. The characteristics of the plasma and the active species within the plasma are instrumental to the efficiency of these techniques. Characterising plasma to for distinct applications requires robust research-grade instruments.

The following article will discuss some of these analyzers and probes and how they may benefit your plasma research.

EQP Mass Spectrometer & Energy Analyzer

The Hiden EQP system uses a mass spectrometer and energy analyzer to measure the charge on ions present in plasma mass and energy. There are also potential applications for use in plasma research through its analysis of neutrals and radicals from plasma processes, which make it useful for etching and deposition studies, ion implantation, laser ablation, and more.

There are a variety of features including a triple filter quadrupole with mass range options available from 1 to 300 amu up to 5000 amu for clusters analysis. The energy range starts at 0-100 eV, with a maximum 1000 eV option available.

Hiden EQP system

PSM Plasma Ion Analyzer

For the fields of plasma chemistry, nano-particle detection, plasma etch end point detection, and pulsed laser deposition studies, there is the Hiden Plasma Sampling Mass Spectrometer. By directly analyzing mass or energy, it can provide information on various plasma parameters such as positive ions, neutral, and radicals.

Similar to the EQP it has as an extremely sensitive and stable triple filter quadrupole with mass range options up to 510 amu.

ESPion Langmuir Probe

The Hiden ESPion is truly a cutting-edge device. An advanced Langmuir probe, it features the fastest pulsed plasma specifications and highest blocking impedance available in a commercial device. Furthermore, a new development allows the ESPion to analyze plasma at atmospheric pressure, opening up new avenues for research.

Designed to measure the electrical properties of low-pressure plasma, including plasma potential, electron temperature, ion density, and ion flux, it can automatically extrapolate plasma parameters to produce real-time data on them. This is hugely important for plasma characterization, plasma potential, electron temperature, and electron energy distribution.

ESPion is offered with a range of linear translators to provide spatially resolved analysis across the plasma volume with standard options available from 300 mm up to 900 mm movement.

HPR-60 MBMS Mass Spectrometer

The HPR-60 MBMS is a molecular beam mass spectrometer purpose built for detailed investigation of plasma ion and radicals at atmospheric pressure. It is equipped to measure both positive and negative ions and, for the analysis of clusters, comes with mass range options from 1-300 amu and up to 5000 amu

For reactors that operate at high temperature and pressure the sample stage can be water cooled and equipped with a platinum tipped sampling orifice, ideal for the conditions present when analyzing flame ionization.

To analyze pulsed plasma there is an integrated MCS mode, with a resolution of up to 50 ns.

Plasma Analyzers from Hiden Analytical

For over 35 years Hiden Analytical have been working on and developing mass spectrometers and probes. They have now brought that same care and expertise into their plasma research equipment and are proud to be manufacturing the equipment furthering the field, with practical applications including the measurement of plasma ions, neutrals, and radicals.

If you would like any more information about their range of plasma analyzers, please send them a message.

This information has been sourced, reviewed and adapted from materials provided by Hiden Analytical.

For more information on this source, please visit Hiden Analytical.


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