THE CHALLENGE: Vacuum-Tight Storage and Transport of Extremely Toxic Chemicals
Highly toxic chemicals are often used in the semiconductor manufacturing process. Chemical plants supplying these chemicals must ensure storage systems have vacuum-tight seals to store and transport their product to the semiconductor processing location.
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A durable helium leak tightness seal was required for a chemical container (canister) subjected to vacuum and positive pressures in one specific application. Due to the volatile nature of the chemicals, plastic elastomer and elastomer seals are not suitable for application.
THE SOLUTION: Sophisticated Engineering of a Metal Seal, HELICOFLEX® DELTA
For this particular application, the HELICOFLEX® DELTA seal was classed as the optimal solution. It includes two small ridges, or “Deltas,” on the seal’s face. The HELICOFLEX® DELTA is the perfect choice due to the high-contact stress in the seal track, making it well-suited for ultra-high vacuum applications that demand extremely low Helium leak rates.
Having first passed the qualification tests in 2000, the HELICOFLEX® DELTA has since achieved Helium leak tightness for both vacuum and at positive pressure conditions and recycling solutions. Technetics supplies thousands of precision metal seals annually to this satisfied customer as increases in the demand for semiconductor processing continue to grow.
Discover more about the HELICOFLEX® DELTA seal, visit the Technetics website, and contact a specialist for a bespoke-engineered solution for your application.
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Image Credit: Technetics Group
This information has been sourced, reviewed and adapted from materials provided by Technetics Group.
For more information on this source, please visit Technetics Group.