S neox 3D Optical Profiler for Micro- and Nano-Scale Measurements

In terms of efficiency, design, performance, and functionality, the new S neox outperforms existing optical 3D profiling microscopes, providing Sensofar with a class-leading areal measurement system.

Easy-to-Use

Sensofar is working constantly in order to provide the best experience to customers. The goal of the fifth generation of the S neox systems has been to make it faster, easier to use, and more intuitive. It is possible to manage the system in just one click, even for users who are just beginners.

Faster than Ever

The S neox is the quickest areal measurement system available on the market, offering data acquisition at 180 fps.

3 Technologies in 1

Confocal methods, Ai Focus Variation, and Interferometry are integrated in the same sensor head in the S neox, without any moving components.

Either the sample or optics (with a very low depth-of-field) are scanned vertically by the Active Illumination Focus Variation, in order to acquire a continuous set of images on the surface. Which points are in focus in each frame are determined by an algorithm, and all of the in-focus points from all of the frames are combined to build up an entire image.

Courtesy of the use of active illumination, which can attain a more reliable focus location even on surfaces which are optically smooth, this process has been improved. Advantages of this technology include large vertical range measurements, high slope surfaces (up to 86 degrees), and the highest speed (up to 3 mm/s).

The surface height of extremely continuous and smooth surfaces is measured by the PSI (Phase Shift Interferometry). This is done with sub-Angstrom resolution for each of the numerical apertures (NA).

The CSI (Coherence Scanning Interferometry) uses white light to scan the surface height of smooth to moderately rough surfaces, achieving 1 nm height resolution at any magnification.

The surface height of very rough or very smooth surfaces can be measured by Confocal profilers. The highest lateral resolution is provided by Confocal profiling – as much as 0.14 μm line & space, which with spatial sampling can be reduced to 0.01 μm.

In order to measure smooth surfaces which have steep local slopes exceeding 70 degrees, or for rough surfaces of up to 86 degrees, high NA (0.95) and magnification (150X) lenses are available.

Key Features

  • It is possible to measure transparent films from 50 nm to 1.5 μm in under one second, courtesy of the thin film measurement technique. The objective magnification dictates sample evaluation spot diameter, and can be as high as 40 μm or as low as 0.5 μm.
  • Nanometer-level system noise is delivered by the high resolution Sensofar proprietary algorithms. These are applicable to any measurement technique at the greatest possible lateral resolution for an optical instrument.
  • High Slopes – S neox is designed in order to measure up to 86 degrees on rough samples and up to 71 degrees on smooth surfaces (0.95 NA).
  • In order to emphasize the extremely small height features, which have no contrast in normal observation, DIC (Differential Interference Contrast) observation is used.
  • On highly reflective surfaces, drop-out points and reflection are mitigated against by the HDR (High Dynamic Range).
  • The time-consuming and discrete plane-by-plane acquisition of classical Confocal is avoided by the Continuous Confocal mode, which simultaneously scans the in-plane and Z axis. This is vital for reducing acquisition time for large Z scans and large areas scans.
  • Pixels in which data is not reliable are identified pixel by pixel by the SND (Smart Noise Detection) algorithm, without lateral resolution loss being compromised.
  • The improved design includes a full stand structure range (measuring samples up to 300 x 300 mm2 and max. height up to 350 mm.), a Ring light (LED illumination at the focal plane), and a motorized nosepiece (up to 6 lenses simultaneously).
  • Consisting of a high-precision motorized rotating A axis with 360 degrees of endless rotation, the Optional rotational stage is equipped with a System 3R clamping system.
  • Courtesy of its intuitive and clear user-friendly interface, the SensoSCAN software drives the systems, from Sample Navigation to Analysis & Reporting. The user is given a unique experience, as they are guided through the 3D environment.
  • Performing a wide range of analysis tasks, SensoVIEW is a powerful advanced analysis software which is provided (with sequential and interactive operators’ tools).
  • There are also other softwares available. These include SensoMAP, which is an extremely advanced analysis and reporting tool which is based on Mountains technology. Also available is SensoPRO, which comes with customizable modules and guided SW in order to simplify quality controls on the production line.

3D Optical Profiler - S neox

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