The S Wide - A Metrology Tool for Wide Areas

The S wide from Sensofar is a steadfast system that has been specifically developed to quickly quantify big sample areas ranging up to 300 × 300 mm. It offers all the advantages of a digital microscope combined into a high-resolution measuring instrument. It is extremely user-friendly with just a single-button acquisition.

The most suitable system for measuring big samples

  • We offer xy stages up to 300 x 300mm
  • Very fast measurement: it takes 1s to measure a FOV of 34.7 x 29.1mm

Image Credit: Sensofar Metrology

Accurate 3D topographies plus color information

Image Credit: Sensofar Metrology

Sub-Micron Height Repeatability Over the Entire Extended Area

The S Wide is a Metrology Tool for Wide Areas

Image Credit: Sensofar Metrology

Traceability

Every S wide has been produced to offer precise and traceable measurements. Systems are calibrated with the help of traceable standards as per ISO 25178 and VDI 2634-2.

The S Wide is a Metrology Tool for Wide Areas

Image Credit: Sensofar Metrology

One-Shot Height Measurement Up To 40 mm Without Z Scanning

The S Wide is a Metrology Tool for Wide Areas

Image Credit: Sensofar Metrology

Wide Areas

Form Deviation From 3D CAD Models

Offers geometric difference and tolerance measurement.

The S Wide is a Metrology Tool for Wide Areas

Image Credit: Sensofar Metrology

Solutions

  • Advanced manufacturing is possible
  • Consumer electronics
  • Archaeology and paleontology
  • Optics
  • Watch industry
  • Medical devices
  • Molding

Bi-telecentric lenses are available with very low field distortion offering precise metrology.

The S Wide is a Metrology Tool for Wide Areas

Image Credit: Sensofar Metrology 

Software

SensoSCAN

The software drives the system with its clear, intuitive and easy-to-face interface. The operator is guided via the 3D environment, thereby providing a unique user experience.

Different measuring algorithms to adapt to the sample needs

 

Image Credit: Sensofar Metrology

Automated Procedures Module

Automated measurements are achieved with the help of the Recipes tool, which is a personalized way to make quality control procedures. It is very simple to specify procedures for automating measurements with automatic fiducial recognition and sample identification.

The S Wide is a Metrology Tool for Wide Areas

Image Credit: Sensofar Metrology

SensoPRO

Executing quick quality control on a production line has never been so easy. With SensoPRO, the operator needs to load the sample and track guided instructions to get “pass or fail” criteria. Plug-in-based data analysis algorithms offer a high degree of flexibility. 

The S Wide is a Metrology Tool for Wide Areas

Image Credit: Sensofar Metrology

System Specifications

Table 1. Source: Sensofar Metrology

. .
Measuring principle Fringe Projection (Gray code & Slit, Gray code & Phase Shift)
Observation types Bi-telecentric lens with 0.243X magnification and 0.015 NA
Color camera 5Mpx: 2448x2048 pixels (60 fps)
Total magnification (27" screen) 11X
Display resolution 0.001 µm
Max. Extended measuring area 300x300 mm with 10x12 stitched fields (Max. resolution 450 Mpx)
Vertical measuring range 10 mm (up to 40 mm)
XY stage range Manual: 150x100 mm; Motorized: 154x154 mm, 302x302 mm
LED light sources Green (530 nm) and blue (460 nm)
Ring light illumination White
Sample weight up to 25 Kg
Sample height 105 mm (standard); 280 mm (optional)
User management rights Administrator, advanced operator, operator
Advanced software analysis Included: SensoVIEW; Optional: SensoPRO, SensoMAP, Geomagic®
Power Line Voltage 100-240 V AC; frequency 50/60 Hz single phase
Computer Latest INTEL processor; 3840x2160 pixels resolution (4K) (27”)
Operating system Microsoft Windows® 10, 64 bit
Weight4 55 Kg (121 lbs) table-top system; 8 Kg (18 Ibs) integrable head
Environment Temperature 10 ºC to 35 ºC; Humidity <80 % RH; Altitude <2000 m

 

Objective Lenses

Table 2. Source: Sensofar Metrology

  FRINGE PROJECTION
MAG 0.243X
NA 0.015
WD (mm) 80
FOV1 (mm) 34.7 x 29.1
Spatial sampling2 (µm) 14.2
Optical resolution3 (µm) 9.35

 

Accuracy and Repeatability

Table 3. Source: Sensofar Metrology

Standard U , σ
Step height U = 2.5 µm,
σ = 0.05 µm
Area roughness (Sa) U = 1 µm,
σ = 0.01 µm
Profile
roughness (Ra)
U = 1 µm,
σ = 0.05 µm

 

1 Maximum field of view with 3/2” camera. 2 Pixel size on the surface. 3 L&S: Line and Space. Values for blue LED. 4 Adjustable stand with H105 XY Stage.

Dimensions

The S Wide is a Metrology Tool for Wide Areas

Image Credit: Sensofar Metrology

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