The S neox Cleanroom represents a previously unheard-of technological turning point for optical metrology. It offers the most versatility within manufacturing settings.
With its four different light sources and four-in-one technology, the S neox Cleanroom offers unmatched adaptability for shifting application requirements.
![S neox Cleanroom—For Optical Metrology](https://d12oja0ew7x0i8.cloudfront.net/images/equipments/EquipmentImage_8460_16714373369315459.png)
Image Credit Sensofar Metrology
It has been meticulously designed to be ISO Class 1 and ESD compatible.
![S neox Cleanroom—For Optical Metrology](https://d12oja0ew7x0i8.cloudfront.net/images/equipments/EquipmentImage_8460_1671437343743303.png)
Image Credit: Sensofar Metrology
Piezoelectric Z motor integration is an option for the S neox Cleanroom, improving performance. It also covers thicknesses between 50 nm and 5 mm.
![S neox Cleanroom—For Optical Metrology](https://d12oja0ew7x0i8.cloudfront.net/images/equipments/EquipmentImage_8460_16714373498037832.png)
Image Credit: Sensofar Metrology
Focus on the sample’s surface and the integrable head will automatically determine the best acquisition setting for any measurement with this equipment when using the 3D Auto mode.
![S neox Cleanroom—For Optical Metrology](https://d12oja0ew7x0i8.cloudfront.net/images/equipments/EquipmentImage_8460_16714373554151749.png)
Image Credit: Sensofar Metrology
Objective Lenses
Table 1. Source: Sensofar Metrology
|
Brightfield |
Interferometry |
MAG |
5X |
10X |
20X |
50X |
100X |
150X |
2.5X |
5X |
10X |
20X |
50X |
100X |
NA |
0.15 |
0.30 |
0.45 |
0.80 |
0.90 |
0.95 |
0.075 |
0.13 |
0.30 |
0.40 |
0.55 |
0.70 |
WD (mm) |
23.5 |
17.5 |
4.5 |
1.0 |
1.0 |
0.2 |
10.3 |
9.3 |
7.4 |
4.7 |
3.4 |
2.0 |
FOV1 (μm) |
3378x
2826 |
1689x
1413 |
845x
707 |
338x
283 |
169x
141 |
113x
94 |
6756x
5652 |
3378x
2826 |
1689x
1413 |
845x
707 |
338x
283 |
169x
141 |
Spatial sampling2 (μm) |
1.38 |
0.69 |
0.34 |
0.13 |
0.07 |
0.05 |
2.76 |
1.38 |
0.69 |
0.34 |
0.13 |
0.07 |
Optical resolution3 (μm) |
0.94 |
0.47 |
0.31 |
0.18 |
0.16 |
0.148 |
1.87 |
1.08 |
0.47 |
0.35 |
0.26 |
0.20 |
Measurement noise4 (nm) |
100 |
30 |
8 |
5 |
3 |
1 |
PSI/ePSI 0.1 nm (0.01 nm with PZT) CSI 1 nm |
Maximum slope5 (º) |
9 |
17 |
27 |
44 |
64 |
72 |
4 |
7 |
17 |
24 |
33 |
44 |
System Specifications
Table 2. Source: Sensofar Metrology
. |
. |
Measuring principle |
Confocal, PSI, ePSI, CSI, Ai Focus Variation and Thin Film |
Measurement types |
Image, 3D, 3D thickness, profile and coordinates |
Camera |
5 Mpx: 2448x2048 pixels (60 fps) |
Confocal frame rate |
60 fps (5 Mpx); 180 fps (1.2 Mpx) |
Vertical scan range coarse |
Linear stage: 40 mm range; 5 nm resolution |
Vertical scan range fine |
Piezoelectric scanner with capacitive sensor: 200 μm range; 1.25 nm resolution |
Max. Z measuring range |
PSI 20 μm, ePSI 10 mm, CSI 10 mm; Confocal & Ai Focus Variation 34 mm |
LED light sources |
Red (630 nm); green (530 nm); blue (460 nm) and white (575 nm; center) |
Nosepiece |
6 positions fully motorized |
Sample reflectivity |
0.05% to 100% |
Advanced Software Analysis |
Inc: SensoVIEW; Op: SensoPRO, SensoMAP |
Communication protocol |
DLL; XML (optional) |
Computer |
Latest INTEL processor |
Operating system |
Microsoft Windows 10®, 64 bit |
Cable Length |
3 m (5 m, 10 m optional) |
Environment |
Temperature 10 ºC to 35 ºC; Humidity <80% RH; Altitude <2000 m |
S neox Cleanroom sensor, the highest flexibility compatible with Cleanroom - Ads
Dimensions
![S neox Cleanroom—For Optical Metrology](https://d12oja0ew7x0i8.cloudfront.net/images/equipments/EquipmentImage_8460_16714393454926229.png)
Image Credit: Sensofar Metrology
1 Maximum field of view with 3/2” camera and 0.5X optics.
2 Pixel size on the surface.
3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Spatial sampling could limit the optical resolution for interferometric objectives. Values for blue LED.
4 Measurement noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. For interferometry objectives, PSI, 10 phase averages. The 0.01 nm are achieved with Piezo stage scanner and temperature-controlled room. Values for green LED (white LED for CSI). Values obtained in a VC-E vibration environment.
5 On smooth surfaces. Up to 86° on rough surfaces.
6 This is the weight of the sensor head with one objective in the turret.