The S mart is the smallest areal confocal sensor currently available, and provides the ideal combination of compact design and versatility profilometer.
- FOV (single shot) > 3.4 × 2.8 mm
- Acquisition time 7 s
- Optical resolution < 177 nm
- System noise < 1 nm
Image Credit: Sensofar Metrology
Compact Versatility
The S mart offers the essential measurement versatility to deal with a different range of surface types and topographies.
With Sensofar’s 3-in-1 technology — three measurement technologies integrated into a single sensor head through a patented microdisplay approach — the system can easily be switched to the most suitable method for the task at hand. It is a small, economical and versatile solution.
Image Credit: Sensofar Metrology
Objective Lens
Table 1. Source: Sensofar Metrology
| |
Brightfield |
Interferometric |
| Magnification |
2.5X |
5X |
10X |
20X |
50X |
100X |
150X |
5X |
10X |
20X |
50X |
100X |
| NA |
0.075 |
0.15 |
0.30 |
0.45 |
0.80 |
0.90 |
0.95 |
0.13 |
0.30 |
0.40 |
0.55 |
0.70 |
| WD (mm) |
6.5 |
23.5 |
17.5 |
4.5 |
1.0 |
1.0 |
0.2 |
9.3 |
7.4 |
4.7 |
3.4 |
2.0 |
| FOV1 (µm) |
6800x5675 |
3400x2837 |
1700x1420 |
850x710 |
340x284 |
170x142 |
113x95 |
3400x2837 |
1700x1420 |
850x710 |
340x284 |
170x142 |
| Spatial sampling2 (µm) |
5.52 |
2.76 |
1.38 |
0.69 |
0.28 |
0.14 |
0.09 |
2.76 |
1.38 |
0.69 |
0.28 |
0.14 |
| Optical resolution3 (µm) |
2.23 |
1.11 |
0.55 |
0.37 |
0.21 |
0.18 |
0.17 |
2.76 |
1.38 |
0.69 |
0.30 |
0.24 |
| System noise (nm) |
300 |
75 |
25 |
8 |
3 |
2 |
1 |
1 |
| Maximum slope5 (º) |
3 |
8 |
14 |
21 |
42 |
51 |
71 |
3 |
8 |
14 |
21 |
42 |
System Specifications
Table 2. Source: Sensofar Metrology
| . |
. |
| Measuring principle |
Confocal, CSI and Focus Variation |
| Measurement types |
Image, 3D, 3D thickness, profile and coordinates |
| Camera |
1.2Mpx: 1232x1028 pixels (28 fps) |
| Confocal frame rate |
9,5 fps |
| Vertical scan range |
Linear stage: 40 mm range; 2 nm resolution |
| Max. Z measuring range |
Confocal 36 mm; CSI 7 mm; Focus Variation 25 mm |
| LED light sources |
white 575 nm (default, lifetime 40.000 h – other options available) |
| Nosepiece |
5 position fully motorized |
| Sample reflectivity |
0.05 % to 100% |
| Advanced Software Analysis |
Inc: SensoVIEW; Op: SensoPRO, SensoMAP |
| Software communication |
DLL (C++ or C#, Windows 10® - 64 bits)
XML (any operating system) |
| Computer |
Latest INTEL processor |
| Operating system |
Microsoft Windows 10®, 64 bit |
| Cable Length |
10 m |
| Environment |
Temperature 10 ºC to 35 ºC; Humidity <80 % RH; Altitude <2000 m |
1 Maximum field of view with 2/3” camera and 0.5X optics. 2 Pixel size on the surface. 3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Spatial sampling could limit the optical resolution for interferometric objectives. Values for white LED. 4 System noise measured as the difference between two consecutive measurements of a calibration mirror placed perpendicular to the optical axis. Values obtained in a VC-E vibration environment. 5 On smooth surfaces. Up to 86° on rough surfaces. Other objectives are available.
Dimensions
Image Credit: Sensofar Metrology