Integrable Metrology 3D Sensors - S mart

The S mart is the smallest areal confocal sensor currently available, and provides the ideal combination of compact design and versatility profilometer.

  • FOV (single shot) > 3.4 × 2.8 mm
  • Acquisition time 7 s
  • Optical resolution < 177 nm
  • System noise < 1 nm

Integrable Metrology 3D Sensors

Image Credit: Sensofar Metrology

Compact Versatility

The S mart offers the essential measurement versatility to deal with a different range of surface types and topographies.

With Sensofar’s 3-in-1 technology — three measurement technologies integrated into a single sensor head through a patented microdisplay approach — the system can easily be switched to the most suitable method for the task at hand. It is a small, economical and versatile solution.

Integrable Metrology 3D Sensors

Image Credit: Sensofar Metrology

Objective Lens

Table 1. Source: Sensofar Metrology

  Brightfield Interferometric
Magnification 2.5X 5X 10X 20X 50X 100X 150X 5X 10X 20X 50X 100X
NA 0.075 0.15 0.30 0.45 0.80 0.90 0.95 0.13 0.30 0.40 0.55 0.70
WD (mm) 6.5 23.5 17.5 4.5 1.0 1.0 0.2 9.3 7.4 4.7 3.4 2.0
FOV1 (µm) 6800x5675 3400x2837 1700x1420 850x710 340x284 170x142 113x95 3400x2837 1700x1420 850x710 340x284 170x142
Spatial sampling2 (µm) 5.52 2.76 1.38 0.69 0.28 0.14 0.09 2.76 1.38 0.69 0.28 0.14
Optical resolution3 (µm) 2.23 1.11 0.55 0.37 0.21 0.18 0.17 2.76 1.38 0.69 0.30 0.24
System noise (nm) 300 75 25 8 3 2 1 1
Maximum slope5 (º) 3 8 14 21 42 51 71 3 8 14 21 42

 

System Specifications

Table 2. Source: Sensofar Metrology

. .
Measuring principle Confocal, CSI and Focus Variation
Measurement types Image, 3D, 3D thickness, profile and coordinates
Camera 1.2Mpx: 1232x1028 pixels (28 fps)
Confocal frame rate 9,5 fps
Vertical scan range Linear stage: 40 mm range; 2 nm resolution
Max. Z measuring range Confocal 36 mm; CSI 7 mm; Focus Variation 25 mm
LED light sources white 575 nm (default, lifetime 40.000 h – other options available)
Nosepiece 5 position fully motorized
Sample reflectivity 0.05 % to 100%
Advanced Software Analysis Inc: SensoVIEW; Op: SensoPRO, SensoMAP
Software communication DLL (C++ or C#, Windows 10® - 64 bits)
XML (any operating system)
Computer Latest INTEL processor
Operating system Microsoft Windows 10®, 64 bit
Cable Length 10 m
Environment Temperature 10 ºC to 35 ºC; Humidity <80 % RH; Altitude <2000 m

 

1 Maximum field of view with 2/3” camera and 0.5X optics. 2 Pixel size on the surface. 3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Spatial sampling could limit the optical resolution for interferometric objectives. Values for white LED. 4 System noise measured as the difference between two consecutive measurements of a calibration mirror placed perpendicular to the optical axis. Values obtained in a VC-E vibration environment. 5 On smooth surfaces. Up to 86° on rough surfaces. Other objectives are available.

Dimensions

Integrable Metrology 3D Sensors

Image Credit: Sensofar Metrology

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