The S neox fulfills the need for utmost flexibility in an integrable sensor and is, therefore, the most versatile industrial system that is commercially available.
- FOV (single shot) > 6.7 × 5.6 mm
- Acquisition time 3 s
- Optical resolution < 148 nm
- System noise < 0.01 nm
Image Credit: Sensofar Metrology
Extreme Versatility with High Performance
The S neox pushes versatility to the extreme: with 4-in-1 technology, offering unprecedented adaptability for shifty application needs and the best measurement flexibility on any surface.
The re-design of a few algorithms has helped increase the capability and speed of all technologies. Therefore, the option to add a piezoelectric Z motor makes the S neox the main performer. The S neox covers thicknesses measurements ranging from 50 nm to 5 mm.
Image Credit: Sensofar Metrology
Objective Lens
Table 1. Source: Sensofar Metrology
| |
Brightfield |
Interferometry |
| MAG |
5X |
10X |
20X |
50X |
100X |
150X |
2.5X |
5X |
10X |
20X |
50X |
100X |
| NA |
0.15 |
0.30 |
0.45 |
0.80 |
0.90 |
0.95 |
0.075 |
0.13 |
0.30 |
0.40 |
0.55 |
0.70 |
| WD (mm) |
23.5 |
17.5 |
4.5 |
1.0 |
1.0 |
0.2 |
10.3 |
9.3 |
7.4 |
4.7 |
3.4 |
2.0 |
| FOV1 (µm) |
3378x2826 |
1689x1413 |
845x707 |
338x283 |
169x141 |
113x94 |
6756x5652 |
3378x2826 |
1689x1413 |
845x707 |
338x283 |
169x141 |
| Spatial sampling2 (µm) |
1.38 |
0.69 |
0.34 |
0.13 |
0.07 |
0.05 |
2.76 |
1.38 |
0.69 |
0.34 |
0.13 |
0.07 |
| Optical resolution3 (µm) |
0.94 |
0.47 |
0.31 |
0.18 |
0.16 |
0.148 |
1.87 |
1.08 |
0.47 |
0.35 |
0.26 |
0.20 |
| System noise4 (nm) |
100 |
30 |
8 |
5 |
3 |
1 |
PSI/ePSI 0.1 nm (0.01 nm with PZT) CSI 1 nm |
| Maximum slope5 (º) |
9 |
17 |
27 |
44 |
64 |
72 |
4 |
7 |
17 |
24 |
33 |
44 |
System Specifications
Table 2. Source: Sensofar Metrology
| . |
. |
| Measuring principle |
Confocal, PSI, ePSI, CSI, Ai Focus Variation and Thin Film |
| Measurement types |
Image, 3D, 3D thickness, profile and coordinates |
| Camera |
5Mpx: 2448x2048 pixels (60 fps) |
| Confocal frame rate |
60 fps (5Mpx); 180 fps (1.2 Mpx) |
| Vertical scan range coarse |
Linear stage: 40 mm range; 5 nm resolution |
| Vertical scan range fine |
Piezoelectric scanner with capacitive sensor: 200 µm range; 1.25 nm resolution |
| Max. Z measuring range |
PSI 20 µm; CSI 10 mm; Confocal & Ai Focus Variation 34 mm |
| LED light sources |
Red (630 nm); green (530 nm); blue (460 nm) and white (575 nm; center) |
| Nosepiece |
6 position fully motorized |
| Sample reflectivity |
0.05 % to 100% |
| Advanced Software Analysis |
Inc: SensoVIEW; Op: SensoPRO, SensoMAP |
| Software communication |
DLL (C++ or C#, Windows 10® - 64 bits)
XML (any operating system) |
| Computer |
Latest INTEL processor |
| Operating system |
Microsoft Windows 10®, 64 bit |
| Cable Length |
5 or 10 m |
| Environment |
Temperature 10 ºC to 35 ºC; Humidity <80 % RH; Altitude <2000 m |
1 Maximum field of view with 3/2” camera and 0.5X optics. 2 Pixel size on the surface. 3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Spatial sampling could limit the optical resolution for interferometric objectives. Values for blue LED. 4 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. For interferometry objectives, PSI, 10 phase averages. The 0.01 nm are achieved with Piezo stage scanner and temperature-controlled room. Values for green LED (white LED for CSI). Values obtained in a VC-E vibration environment. 5 On smooth surfaces. Up to 86° on rough surfaces.
Dimensions
Image Credit: Sensofar Metrology