Integrable Metrology 3D Sensors - S neox

The S neox fulfills the need for utmost flexibility in an integrable sensor and is, therefore, the most versatile industrial system that is commercially available.

  • FOV (single shot) > 6.7 × 5.6 mm
  • Acquisition time 3 s
  • Optical resolution < 148 nm
  • System noise < 0.01 nm

Integrable Metrology 3D Sensors

Image Credit: Sensofar Metrology

Extreme Versatility with High Performance

The S neox pushes versatility to the extreme: with 4-in-1 technology, offering unprecedented adaptability for shifty application needs and the best measurement flexibility on any surface.

The re-design of a few algorithms has helped increase the capability and speed of all technologies. Therefore, the option to add a piezoelectric Z motor makes the S neox the main performer. The S neox covers thicknesses measurements ranging from 50 nm to 5 mm.

Integrable Metrology 3D Sensors

Image Credit: Sensofar Metrology

Objective Lens

Table 1. Source: Sensofar Metrology

  Brightfield Interferometry
MAG 5X 10X 20X 50X 100X 150X 2.5X 5X 10X 20X 50X 100X
NA 0.15 0.30 0.45 0.80 0.90 0.95 0.075 0.13 0.30 0.40 0.55 0.70
WD (mm) 23.5 17.5 4.5 1.0 1.0 0.2 10.3 9.3 7.4 4.7 3.4 2.0
FOV1 (µm) 3378x2826 1689x1413 845x707 338x283 169x141 113x94 6756x5652 3378x2826 1689x1413 845x707 338x283 169x141
Spatial sampling2 (µm) 1.38 0.69 0.34 0.13 0.07 0.05 2.76 1.38 0.69 0.34 0.13 0.07
Optical resolution3 (µm) 0.94 0.47 0.31 0.18 0.16 0.148 1.87 1.08 0.47 0.35 0.26 0.20
System noise4 (nm) 100 30 8 5 3 1 PSI/ePSI 0.1 nm (0.01 nm with PZT) CSI 1 nm
Maximum slope5 (º) 9 17 27 44 64 72 4 7 17 24 33 44

 

System Specifications

Table 2. Source: Sensofar Metrology

. .
Measuring principle Confocal, PSI, ePSI, CSI, Ai Focus Variation and Thin Film
Measurement types Image, 3D, 3D thickness, profile and coordinates
Camera 5Mpx: 2448x2048 pixels (60 fps)
Confocal frame rate 60 fps (5Mpx); 180 fps (1.2 Mpx)
Vertical scan range coarse Linear stage: 40 mm range; 5 nm resolution
Vertical scan range fine Piezoelectric scanner with capacitive sensor: 200 µm range; 1.25 nm resolution
Max. Z measuring range PSI 20 µm; CSI 10 mm; Confocal & Ai Focus Variation 34 mm
LED light sources Red (630 nm); green (530 nm); blue (460 nm) and white (575 nm; center)
Nosepiece 6 position fully motorized
Sample reflectivity 0.05 % to 100%
Advanced Software Analysis Inc: SensoVIEW; Op: SensoPRO, SensoMAP
Software communication DLL (C++ or C#, Windows 10® - 64 bits)
XML (any operating system)
Computer Latest INTEL processor
Operating system Microsoft Windows 10®, 64 bit
Cable Length 5 or 10 m
Environment Temperature 10 ºC to 35 ºC; Humidity <80 % RH; Altitude <2000 m

 

1 Maximum field of view with 3/2” camera and 0.5X optics. 2 Pixel size on the surface. 3 L&S: Line and Space, half of the diffraction limit according to the Rayleigh criterion. Spatial sampling could limit the optical resolution for interferometric objectives. Values for blue LED. 4 System noise measured as the difference between two consecutive measures on a calibration mirror placed perpendicular to the optical axis. For interferometry objectives, PSI, 10 phase averages. The 0.01 nm are achieved with Piezo stage scanner and temperature-controlled room. Values for green LED (white LED for CSI). Values obtained in a VC-E vibration environment. 5 On smooth surfaces. Up to 86° on rough surfaces.

Dimensions

Integrable Metrology 3D Sensors

Image Credit: Sensofar Metrology

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