Spectroscopic Ellipsometry for Thin Film Characterization - SE-1000

The SE-1000 spectroscopic ellipsometer available from Semilab delivers high measurement performance and offers modularity in a small tabletop footprint.

This economical tool contains manual sample positioning and a manual goniometer, ideal for research and development labs.

The SE-1000 carries out non-destructive and non-contact optical measurements on substrates, as well as both multi-layer and single-layer samples to achieve thickness and optical properties of individual thin films.

The SE-1000 tool features Semilab’s advanced smart electronics with exchangeable components and functions with the latest generation operating and analysis software (SAM/SEA). The system can be managed from a laptop or PC via a new touch panel interface, or through LAN network.

Measurement Modes

  • Polarimetry
  • Jones matrix
  • Mueller matrix 11 coefficients
  • Generalized ellipsometry for anisotropic samples
  • Spectroscopic ellipsometry with rotating compensator
  • In situ measurement mode for real-time control at the time of etch or deposition process
  • Porosimetry: Measurements of porosity and pore size distribution in thin films

Options

  • Visualization camera
  • Microspot
  • Atmospheric thin-film porosimetry
  • Spectroscopic reflectometer
  • Near-infrared spectral extension
  • Liquid cell, heating, and cooling stages

Manual XY stage

Manual XY stage

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