Deep Level Transient Spectroscopy

The DLS is designed for interfacing to a wide range of cryostats.

Full range of measurement modes:

  • Temperature scan
  • Depth profiling
  • Frequency scan
  • Capture cross-section measurement
  • Conductance transient measurements
  • C-V characterization
  • Optical injection

Optional analog or digital control of settings to allow real user-friendly operation

  • Full computer control with wide-ranging software support, full library database for accurate contamination identification
  • Sample quality test by I-V, C-V

DLS-1000

The DLS-1000 is an enhanced, high-sensitivity system. Compared to its predecessor, the DLS-83D, it is eight times more sensitive.

DLS-1000

The system provides a fully automatic measurement mode, as well as a full interpretation of the measured data, including impurity identification and concentration determination without any need for user interaction.

The Deep Level Transient Spectroscopy (DLTS) is the finest method for monitoring and characterizing deep levels caused by deliberately or accidentally introduced impurities and defects in semiconductor materials and whole devices.

Features and System Specifications

  • Maximum sensitivity (2×108 atoms/cm3) for detection of trace levels of contamination
  • Interfacing to a wide range of cryostats
  • Broad range of measurement modes:
    • temperature scan
    • depth profiling
    • frequency scan
    • optical injection
    • C-V characterization
    • capture cross-section measurement
    • conductance transient measurements
  • Controlled by analog and digital settings to allow operational ease
  • Sample quality test by I-V, C-V
  • Complete computer control with wide-ranging software support, full library database for accurate contamination identification

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