Energy Dispersive Spectroscopy (EDS)

Energy dispersive spectroscopy is used to perform a localized chemical assessment by evaluating the X-ray spectrum released from a sample inundated by a focused ray of electrons. All elements from Beryllium (atomic number 4) to Uranium (92) can be detected with the technique, but some devices have difficulty with 'light elements' that have an atomic number less than 10.

Qualitative evaluation involves the identification of the strains in the spectrum. Quantitative investigation requires gauging the power of the line for each element in the sample. Element distribution 'maps' can be made by scanning the beam in a television-like rectangular pattern. Additionally, pictures generated by electrons compiled from the sample reveal exterior topography or mean atomic number variances.

Primary EDS evaluation generally involves the creation of an X-ray spectrum from the entire scan region of a Scanning Electron Microscope.