Designed for semiconductor, MOCVD, and other gas flow control applications that require a high purity all-metal flow path, the Brooks GF Series mass flow controllers deliver outstanding performance, reliability, and flexibility. Highlights of the GF series industry-leading features include: ultra fast 300 millisecond settling time, MultiFlo™ gas and range programmability, optional pressure transient insensitivity (PTI), local display, extremely low wetted surface area, and corrosion resistant Hastelloy® sensor tube and valve seat.