Microflow Sensor Technology - Advantages and Applications of MFS 02 Fast Flow Sensor

Especially for fast flow measurements and wire bonding assembly, the Flow Sensor MFS 02 was developed. Due to a membrane system the thermal mass is reduced to the minimum. Very fast response time and low power consumption are resulting from this little thermal mass.

The membrane is just a few microns thick and is carried by a glass substrate. Therefore the system is robust and the device can be handled easily.

Advantages of MFS 02 Flow Sensor

The advantages of MFS 02 Flow Sensor include:

  • Fast response time
  • Small mass flow rates
  • Detection of flow direction
  • Low power consumption
  • Small thermal mass
  • Robust design
  • Best price-performance ratio

Applications of MFS 02 Flow Sensor

  • Medical devices
  • Home spirometers
  • Differential pressure sensors
  • Mikrofluidic (gas)

MEMS-Manufacturing Process –F O T U R A N

Photo-structuring

Final sensor element

MEMS-Manufacturing Process –Sensor Structures

  • Photo structured glass substrate with membrane -polymere dot
  • Spin coating prozess
  • Sputtering thin film platinum
  • Photolithographic mask process
  • Ion based etching process
  • RTD-structure passivation

Sensor Application –Chip Layouts and Circuits

  • Different resistor arrangements and values depending on flow application
  • Customized sensors possible because of inexpensive mask processes

Simple resistive structure for using in CTA -mode

Using as full bridge with Constant voltage or current supply Flow direction sensitive

Using as full bridge with Constant voltage or current supply Flow direction sensitive

Using as full bridge in a CTA; Flow direction sensitive

Using as full bridge in a CTA; Flow direction sensitive

Sensor Application –Thermal Sensor Properties

Simple full bridge calorimeter mode Sensor supply 3mA and about 2,5 volts Flow rate 0,00 mlN/min

Simple full bridge calorimeter mode Sensor supply 3mA and about 2,5 volts Flow rate 0,00 mlN/min

Simple full bridge calorimeter mode Sensor supply 3mA and about 2,5 volts Flow rate 200 mlN/min

Simple full bridge calorimeter mode Sensor supply 3mA and about 2,5 volts Flow rate 200 mlN/min

Full bridge calorimeter mode and CTA biasing Sensor supply 4mA and about 3,5 volts Flow rate 600 mlN/min

Full bridge calorimeter mode and CTA biasing Sensor supply 4mA and about 3,5 volts Flow rate 600 mlN/min

Sensor Application –Measuring Properties

  • Unamplified nominal sensitivity 3mV/ mlNmin-1 In zero cross point
  • Physical flow range enlargement by full bridge mode with CTA biasing
  • No cool down effect of heater with CTA biasing.
  • Heating power 10mW to 50mW
  • Stable zero cross point; independent on any drift effects like contamination.

High flow CTA mode-range

High flow CTA mode-range

Sensor Application –Assembly Possibilities

  • Easy to use and robust sensor construction
  • PCB integration by mounting in a cavity or hole
  • Connecting by wire bonding or soldering
  • Backsite mounting of flow channel

  • Sensor mounted in a separate flow channel
  • wire bonded flow sensor for pcb connection
  • Pick & place assembling of sensor possible
  • Plug and play module by USB interface

Example with the wire bonding sensor type MFS02 together with an ASIC on a pcb.

This information has been sourced, reviewed and adapted from materials provided by Innovative Sensor Technology, USA Division.

For more information on this source, please visit Innovative Sensor Technology, USA Division.

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