CSMA is Working on the EU Funded ATOMICS Nano Devices Programme - News Item

CSMA are working with several European companies on the EU funded project, “ATOMICS”.

ATOMICS is intended to establish predictive models for front-end processes of nano devices involving low-temperature and millisecond-annealing strategies and   the use of silicon-germanium-carbon alloys, strained silicon, and silicon-on-insulator for simulating the processing of future nanotechnology devices.

CSMA now has extensive expertise in these areas after the acquisition of MATS-UK in 2005.

A variety of CSMA techniques are to be utilised in the course of this project including:

•         ULESIMS which gives elemental information with depth of a very high resolution and is ideal for monitoring species with depth.

•         SNMS which gives quantified elemental information, with depth, without the need for standards.

•         TEM, with FIB (Focused Ion Beam) sample preparation, which can be used to produce high-resolution images of thin films to look at the composition, structure and give crystallographic information.

Some of the project partners are:

•         Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB)

•         ST Microelectronics

•         Centre National de la Recherche Scientifique LAAS/CEMES

•         Mattson Thermal Products GmbH

•         Synopsys Switzerland LLC

•         Advanced Technology Institute of the University of Surrey

This collaboration keeps CSMA at the centre of semiconductor and multi coating technologies.

Posted April 2006