Residual Gas Analyzer with Full Range Pressure Measurement from Extrel

The Residual Gas Analyzer (RGA) from Extrel enables reliable, full-range pressure measurement at an affordable cost. It includes a Faraday cup detection system with an optional electronic multiplier, providing sensitivity up to 5x10-14 torr.

The Extrel's RGA has an intelligent start-up design with a quadrupole mass analyzer, an ion gauge and a Pirani gauge. It is available in two different mass ranges from 1 to 100 amu or 1 to 300 amu.

The analyzer runs on RS-232C or US communication with Windows® XP or 7 operating systems. It is best suited for vacuum chamber characterization, leak detection and background gas analysis.

Key Features

The main features of the Extrel RGA are as follows:

  • Reliable and easy to use
  • Faraday cup allows full-range pressure measurement from 10-4 to 10-11 torr
  • Addition of multiplier to Faraday cup extends measurement down to 5x10-14 torr
  • Dual thoria-coated filaments allow electron emission during quadrupole and ion gauge operation
  • RGA100 and RGA300 measurement probes
  • Ion and the Pirani gauge functions protect filaments from stress caused by vacuum excursions
  • Intelligent start-up design offers automatic switching function from Pirani to the ion gauge, and then to quadrupole system
  • RS-232C or US communication with Windows® XP or 7 operating systems
  • Ion current amplifier measures ion currents form 10-6 to 10-15A in a single scan

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