SEMICON West: Air Products to Feature Advanced Materials and Delivery Systems

Air Products will highlight its advanced materials and delivery systems at SEMICON West in San Francisco, Calif., July 9-11.

Mobile computing enabled by smartphones and tablet computers is emerging as a primary driver for high-performance semiconductors that consume less power. These needs are challenging semiconductor manufacturers because fabricating more complex devices can no longer just be addressed by engineering solutions. A wide range of new materials is now required, and, as a result, semiconductor manufacturing has entered the Age of New Materials. Air Products is well-positioned to capitalize on these emerging material needs.

At SEMICON West, Air Products will feature three important platforms of semiconductor manufacturing: Advanced Deposition, Surface Preparation and Cleans, and Planarization, as well as the delivery systems necessary for these advanced materials.

Advanced Deposition Materials
Air Products is utilizing its breadth of knowledge in chemistry and surface science to deposit films as thin as only a few atomic layers. The company offers technology roadmap solutions for organosilanes, organometallics, liquid dopants and other specialty materials.

Surface Preparation and Cleans
Air Products is providing solvent, semi-aqueous and aqueous cleans for photoresist, residue and contamination removal for aluminum and copper back-end-of-line applications. It also is offering cleaning solutions that address all types of packaging including gold and copper wire bonding, wafer level packaging with copper bumps and through-silicon via cleans.

Air Products is developing chemical mechanical planarizing slurries and post-clean chemistries that address the challenges of polishing a variety of materials deposited including silicon-based films, tungsten and copper. Through its 2011 acquisition of Poly Flow, Air Products is also delivering game-changing slurry blend and distribution equipment solutions to lower the cost-of-ownership through enhanced tool uptime and product yields.

“The rapid advancement in mobile devices and the consumer’s demands for performance and long battery lifetimes at affordable prices are pushing semiconductor manufacturers to develop devices with smaller geometries. New materials are enablers for these technology advancements,” said Ed Shober, global business director for Advanced Materials and Delivery Systems at Air Products. “Air Products’ knowledge and advanced thinking around chemistry, materials integration and delivery systems are helping our customers reach their technology and performance targets faster. Additionally, the ability to provide more of an integrated solution for our customers within these semiconductor platforms is a true differentiator in the market.”

To learn more, please visit us at booth 2340 in the South Hall of San Francisco’s Moscone Center or go to


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