Automated Milling of Micro-Compression Pillar Arrays

Measuring mechanical properties of thin coatings requires measurements of samples with similar dimensions as the thickness of the coating - typically a few microns.

A Focused Ion Beam (FIB) is used for site-specific sample preparation e.g., pillars for micro-compression testing. In order to get statistically significant results a large number of pillars with the same dimensions need to be tested. Preparing such an array of identical pillars requires the instrument to have a high degree of stability to ensure maximum repeatability throughout the automated milling process.

5 x 5 array of micro-compression pillars prepared in less than 3 hours

5 x 5 array of micro-compression pillars prepared in less than 3 hours

The new TESCAN S8000G FIB-SEM system is equipped with the high-performance Orage™ Ga FIB column that can achieve ion beam currents up to 100 nA for rapid milling. This makes for automated high-throughput sample preparation using a combination of high beam currents and an optimized beam profile.

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TESCAN USA Inc.

Founded in 1991 by a group of managers and engineers from Tesla with its electron microscopy history starting in the 1950’s, today TESCAN is a globally renowned supplier of Focused Ion Beam workstations, Scanning Electron Microscopes and Optical Microscopes.  TESCAN’s innovative solutions and collaborative nature with its customers have won it a leading position in the world of nano- and microtechnology.  The company is proud to participate in premier research projects with prominent institutions across a range of scientific fields.  TESCAN provides its clients with leading-class products in terms of value, quality and reliability.  TESCAN USA Inc. is the North American arm of TESCAN ORSAY HOLDINGS, a multinational company established by the merger of Czech company TESCAN, a leading global supplier of SEMs and Focused Ion Beam workstations, and the French company ORSAY PHYSICS, a world leader in customized Focused Ion Beam and Electron Beam technology.

This information has been sourced, reviewed and adapted from materials provided by TESCAN.

For more information on this source, please visit Tescan.com.

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