ASM to Host Technical Seminar on Atomic Layer Deposition

ASM International N.V. (Nasdaq: ASMI and Euronext Amsterdam: ASM) today announced that it will be hosting a technical luncheon seminar in Baltimore, Maryland, on Wednesday, December 9, 2009, the last day of the International Electron Devices Meeting (IEDM). The seminar will address important materials, equipment and process innovations that enable high-k and metal gates in volume manufacturing, including processes using Atomic Layer Deposition (ALD) and Plasma Enhanced ALD (PEALD).

The event will be presented in two parts:

  • Part 1: 11:30 - 12:15 -- Walk-in Poster Session and Lunch Buffet.
  • Part 2: 12:15 - 13:00 -- Presentations:
    • Philippe Absil (IMEC) on "ALD High-k and Metal Gates Process Solutions"
    • Hyung Sang Park (ASM) on "Low Temperature PEALD SiO and SiN Spacers"

Following the presentations, there will be an open dialogue around the posters and presentation topics.

The ASM seminar will take place in the Stadium Ballroom at the Hotel Baltimore Marriott Inner Harbor at Camden yards, 110 South Eutaw Street, Baltimore, Maryland, less than 150 meters from the Hilton Baltimore. The room will open at 11:30. Interested parties should contact Rosanne de Vries, + 31 88 100 8569, [email protected]

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