Posted in | Semiconductor

SUSS MicroTec Receives A Large Volume Order for Lithography Projection Scanners

SUSS MicroTec, a leading supplier of equipment and process solutions for the semiconductor industry and related markets, has received an order for multiple SUSS MicroTec Photonic Systemslithography tools in Q3 2015 from a leading semiconductor manufacturer. The strategically important order includes multiple DSC300 Gen2 projection scanners, which are produced at the company's facility in Corona, USA. The order volume is in the high single-digit million Euro range.

The SUSS DSC300 Gen2 offers comparable resolution and overlay performance,while providing significantly higher throughput and lower cost than traditional projection steppers. With this successful new product the Company has enhanced its leadership position in the Advanced Packaging segment.

The tools are dedicated to high volume production of the fast growing fan-out wafer-level packaging technology. Delivery and installation will start already beginning of 2016.

"The DSC300 is the only system on the market that combines the advantages of full field exposure technology and projection lithography in one tool." says Dr. Markus Arendt, General Manager of SUSS MicroTec Photonic Systems. "We are excited about the new opportunities this product brings to the Company. The extensive qualification process at our key customer
demonstrates that the DSC300 Gen2 fully supports leading technology and cost targets."

About SUSS MicroTec

SUSS MicroTec is a leading supplier of equipment and process solutions for microstructuring in the semiconductor industry and related markets. In close cooperation with research institutes and industry partners SUSS MicroTec contributes to the advancement of next-generation technologies such as 3D Integration and nanoimprint lithography as well as key processes for MEMS and LED manufacturing.

With a global infrastructure for applications and service SUSS MicroTec supports more than 8.000 installed systems worldwide. SUSS MicroTec is headquartered in Garching near Munich, Germany.

Citations

Please use one of the following formats to cite this article in your essay, paper or report:

  • APA

    SUSS MicroTec AG. (2019, February 08). SUSS MicroTec Receives A Large Volume Order for Lithography Projection Scanners. AZoM. Retrieved on September 30, 2020 from https://www.azom.com/news.aspx?newsID=44573.

  • MLA

    SUSS MicroTec AG. "SUSS MicroTec Receives A Large Volume Order for Lithography Projection Scanners". AZoM. 30 September 2020. <https://www.azom.com/news.aspx?newsID=44573>.

  • Chicago

    SUSS MicroTec AG. "SUSS MicroTec Receives A Large Volume Order for Lithography Projection Scanners". AZoM. https://www.azom.com/news.aspx?newsID=44573. (accessed September 30, 2020).

  • Harvard

    SUSS MicroTec AG. 2019. SUSS MicroTec Receives A Large Volume Order for Lithography Projection Scanners. AZoM, viewed 30 September 2020, https://www.azom.com/news.aspx?newsID=44573.

Tell Us What You Think

Do you have a review, update or anything you would like to add to this news story?

Leave your feedback
Submit