Picosun announces significant repeat sales of P-300F batch ALD cluster tools

Picosun Group, a leading provider of Atomic Layer Deposition (ALD) thin film coating technology for global industries, reports of significant repeat sales of PICOSUN™ P-300F production cluster tools to major US industry customers.

Semiconductor components manufactured on silicon and compound semiconductor wafers are crucial in several everyday consumer electronics products as well as in e.g. transport, aerospace, or industrial automation and power applications. Even if the majority of the most common IC components is produced on 300 mm silicon wafers, the sub-300-mm manufacturing is vital and increasingly important especially for the existing and emerging non-silicon-based devices. Wafer materials limited to max. 200 mm diameter such as SiC, GaN, AlN, sapphire, GaAs, LiNbO3, and LiTaO3 offer various benefits over silicon and enable a generation of completely new, advanced and innovative end products.

Picosun’s core competence are cost-efficient, turn-key ALD production solutions for the fast growing More-than-Moore market. The PICOSUN™ P-300F tool is the flagship product for these customers. Specially designed to be run in cluster configuration under constant vacuum to enable fast and efficient high throughput manufacturing, the P-300F tools are connected together and operated in fully automatic mode with a central vacuum robot substrate handling and transfer system. The unique batch flipping mechanism in the P-300F tool is ideal for manufacturing lines where the most of the process steps take place in horizontal geometry. Cassette-to-cassette loading for up to 50 pcs batches of 200/150/100 mm wafers, SEMI S2/S8 certification, and SECS/GEM option for factory host integration make the P-300F the optimal choice for demanding manufacturing needs for e.g. moisture barriers, capacitors, and SAW/BAW filters.

“We at Picosun are very happy of the success of our P-300F cluster tools. Our customers have obtained unparalleled process results in them, and this excellent performance has now resulted in repeat sales of these tools to our key industrial customers. The purity, uniformity, and barrier properties of the ALD films deposited in these systems fulfil the strictest requirements of today’s semiconductor industries, making the PICOSUN™ P-300F the tool of choice for the forerunners of semiconductor manufacturing,” states Juhana Kostamo, Managing Director of Picosun.

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