Axcelis Technologies has introduced the new Optima HD, powered by Imax, for extremely high dose, low energy implant applications used for leading-edge memory and logic devices. An extension of the company's new Optima HD platform, the Optima HD Imax enables users to dramatically increase productivity and reduce low energy, high dose process times by implanting clusters of boron, instead of individual atoms. The first Imax-enabled Optima HD tools will begin shipping by the end of the year.
"Molecular implantation is an enabling technology in the sub-65nm device era. It allows customers to achieve productivity goals faster, making certain applications - like dual poly gates - economically viable for the first time," said Mary Puma, chairman and CEO of Axcelis. "Because molecular implantation is based on proven, traditional implant technology, customers find it very easy to implement without integration issues. The beauty of Imax technology is that it offers the same precision, angle control and energy-contamination control customers have come to expect from the Optima HD."
The Optima HD Imax implants molecules of B18 H22 including 18 boron atoms, resulting in higher productivity than users could achieve with traditional approaches, without the risk of energy contamination associated with beam deceleration. This boost in productivity enables chipmakers to adopt a number of emerging trends, including dual poly gate applications for advanced memory devices and shallower junctions in logic chips.
Introduced earlier this year, the Optima HD covers all traditional high dose implants while providing significant mid dose applications overlap for maximum versatility and capital efficiency. It delivers precise implants using Axcelis' advanced spot beam technology, resulting in exceptional implant uniformity and repeatability. Axcelis' proprietary RadiusScan endstation further enhances productivity and enables the system to cover an extremely broad dose range. Imax source technology can be used on all standard Optima HD implanters.
Axcelis has been exploring molecular source technology as a potential candidate for extending low energy implant technology since the late 1990s. The company is using ClusterIon source technology from SemEquip, a manufacturer of ion sources and ion delivery systems for the OEM implanter market.