Jun 29 2006
WHO: Integrated Materials, Inc., Sunnyvale, Calif., a silicon science and technology company, is the first and only company to perfect the manufacture of poly silicon furnace fixtures for semiconductor manufacturing. Its SiFusion technology, enabling the first pure poly silicon furnaceware, provides a breakthrough solution for front-end thermal processes. SiFusion™ poly silicon furnaceware improves fab productivity and reduces costs for 200 mm and 300 mm thermal processes.
WHAT: Integrated Materials will announce a major addition to its lineup of SiFusion furnaceware that offers fabs improved furnace uptime, defect rates and throughput.
SiFusion furnaceware, including boats, injectors, and pedestals, will be on display at Integrated Materials’ booth (#2502, South Hall) as well as the new addition to its SiFusion product lineup that will be revealed at the show.
Additionally, Integrated Materials will share customer performance data that demonstrate measurable yield improvements related to SiFusion. A recent quantitative analysis from Wright Williams & Kelly on SiFusion’s cost-of-ownership for silicon nitride applications will be available along with a new second WWK study that examines SiFusion in the polysilicon process.
Integrated Materials’ SiFusion furnace components are gaining momentum with semiconductor fabs, by improving performance over traditional silicon carbide and quartz consumables. SiFusion furnaceware leverages its ionically pure poly silicon base material to reduce defect density, eliminate routine cleaning and reduce total cost of ownership across thermal processes. SiFusion 300 mm shelf boats were recently selected by Aviza Technology to serve as the designed-in component for their RVP-300plus™ diffusion furnaces.
SiFusion applications include:
- High temperature processes up to 1350°C
- LPCVD processes, including silicon nitride and polysilicon
- HTO
- 200 mm and 300 mm fab environments
- Compatibility with all major furnace OEM systems
WHEN & WHERE:
July 11-13, 2006
SEMICON West 2006
Booth #2502, South Hall
Moscone Center
San Francisco, Calif.