Structured Materials Installs High Temperature Low Pressure Silicon Carbide CVD System

Structured Materials Industries, Inc. announces the sale, delivery and installation of it’s first Dragon CVDTM tool for the Very High Temperature (through 2200C) and Low Deposition Pressure (sub-Torr to atmosphere) deposition of SiC bulk material. The Dragon CVDTM tool presents researchers with a significant new tool to research high temperature deposition processes. This tool was designed and built in collaboration with Penn State University Electro-Optics Center and addresses both high temperature CVD and PVT.

The system features a double walled chamber with water flowing between the walls, a 50 KWatt induction heater system with tuned capacitor, wet or dry pumping, turbo pumping, fully automated process control with redundant safety features including spread sheet programming, real time monitoring and trend analysis among other features, gas and metal organic source capabilities and a compact footprint – all at an economical cost.

This system compliments a growing line of oxide, nitride and carbide tools offered by Structured Materials Industries, Inc. and should be applicable to a range of nitride and related tool. SMI also specializes in custom systems, reactors and other components for CVD and related technologies.

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