Promising Nanotechnology for Cleaning Semiconductors

Lancetta, Inc., a Texas based technology development company, which presented a new patent pending technology for nanoscale cleaning applicable to semiconductors and nanoscale materials processing at the recent Sematech conference in Austin, TX, has been recognized by Joel Barnett of Sematech as one of four new promising nanotech cleaning technology concepts in a summary presentation at the conclusion of the Surface Preparation and Cleansing Conference (SPCC) at the SEMATECH conference.

The novel technology, initially disclosed in an article by Slav Ligai, CEO and Development Director entitled “Rapid Superheat Cleaning for Submicron and Nanoscale Silicon Technology” in Process Cleaning Magazine, Sept/Oct 2006, was accepted by Sematech for presentation at the consortiums annual conference in the Surface Preparation and Cleansing Conference sub group. The new technology, which would potentially utilize significantly reduced quantities of chemical cleaners and solvents resulting in a greener cleaning process with lower corrosive chemical byproducts, could potentially be added to existing semiconductor cleaning processes augmenting or supplanting some existing cleaning processes.

Mr. Ligai, in partnership with the Austin Inventors and Entrepreneurs Association (AustinInventors.org) of which he is a member, will re-present the white paper presented at Sematech to interested members of the technology community and general public at the Austin Public Library, Milwood Branch, on Thursday May 3th at 7:00 PM. There is no fee and all interested parties are invited to the one hour presentation where hand-outs will provided.

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