Versatile Tungsten Thermionic Emission SEM System - VEGA3

The TESCAN VEGA3 is a versatile tungsten thermionic emission SEM system designed for both high- and low-vacuum operations. VEGA3 is furnished with modern electron optics based on a unique four-lens Wide Field Optics™ design with a proprietary intermediate lens. This feature allows a wide scope of imaging modes with valuable capabilities.

The modes are:

  • Channeling
  • Depth
  • Field
  • Wide Field
  • Resolution

Operation is extremely simple, and as they are fully automated, shifting between the different imaging modes is quick and easy. The TESCAN In-Flight Beam Tracing™ technology optimizes all the parameters of the electron beam. This is assured by a continual aperture optimization which guarantees minimum possible spot size over the total range of electron currents.

Each time a change in operating conditions is made, the calculation of the optimal parameters is done in-flight, maximizing beam performance. VEGA3 has a choice of up to four different chamber sizes, a large scope of ports, and optimized geometry for WDX, EDX, and EBSD, including multiple detector systems.

Robust stage with maximum sample height bearing up to 8 Kg depending on the chamber configuration. The extended low-vacuum mode permits imaging on non-conductive samples including biological specimens. VEGA3 is an ideal choice for those looking for a fully functional and reliable entry-level SEM system with a great price-to-performance ratio.

Key Features

  • Sophisticated software for image acquisition, SEM control, archiving, processing and analysis; multi-user environment localized in many languages
  • Quick and easy obtaining of the clean chamber vacuum by powerful turbomolecular and rotary fore vacuum pump
  • Superior specimen handling utilizing a fully motorized compucentric stage
  • The proprietary Intermediate Lens (IML) that works as an "aperture changer" makes the exchange of the effective final aperture in an electromagnetic way
  • Real time In-Flight Beam Tracing™ for the performance and beam optimization integrating the well-established software Electron Optical Design
  • High-throughput large-area automation, e.g., automated particle location and analysis
  • Fully automated microscope set-up including electron optics set-up and alignment
  • Network operations and built-in remote access/diagnostics, all come as the TESCAN standard
  • Unique live stereoscopic imaging utilizing the 3D Beam Technology
  • Unique four-lens Wide Field Optics™ design offering the variety of working and displaying modes embodying the TESCAN proprietary Intermediate Lens (IML) for the beam aperture optimization
  • The column construction, without any mechanical centring elements, allows fully automated column set-up and alignment
  • Ideal geometry for EDX, WDX, EBSD; non-distorted EBSD pattern

Versatile Tungsten Thermionic Emission SEM System - VEGA3

VEGA3 - Picture 1
VEGA3 - Picture 2

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