MicroProf® MHU for Various Sample Wafer Types
The MicroProf® MHU has been specially designed for the semiconductor, MEMS and LED industry and can be easily configured for various sample (wafer) types. Many industrial applications require fully-automated measurements with high throughput. This, in turn, requires automatic handling of the samples. The handling unit can handle wafer sizes between 2 and 8 inches. Depending on the configuration, up to four cassettes can be processed simultaneously.
FRT Metrology - MicroProf® MHU