Measuring Thin High Bow Wafers

FRT Metrology Tool with integrated Bernoulli and vacuum chuck (developed by FRT) can handle extremely thin high bow wafers for measurement purposes, where the wafer needs to be flattened.

To effectively handle different sizes and types of wafers, different kinds of end effectors are required. To facilitate this, a specially designed dual end effector changing station with eight slots is integrated in the tool.

FRT Metrology - Measuring Thin High Bow Wafers
​​​​​​​

Other Videos by this Supplier

Tell Us What You Think

Do you have a review, update or anything you would like to add to this video content?

Leave your feedback
Your comment type
Submit

Materials Videos by Subject Matter