Thin-film multi-layer Measurement
With their metrology tools, FRT can measure simultaneously thin-film multi-layers. In this application video, FRT show you the typical steps of a thin-film multi-layer measurement recipe: sensor referencing, simultaneous point measurements of multiple layers, preview of silicon oxide and silicon nitride thickness, automatic reporting of measurement results and data charts.
Run time: 1:38min
FRT Metrology - Thin Film Multi-layer Measurement