Dec 17 2007
Philipps-University of Marburg, one of the leading research centres in Germany, has placed an order for a Close Coupled Showerhead® (CCS) 300mm CRIUS® cluster system that includes two silicon- and III/V-based material MOVPE modules.
This is first ever order for a CRIUS® CCS® MOVPE system in the 300mm configuration. Applications are particularly suitable for the growth of III/V compound semiconductors on commercially available silicon wafers. The new MOVPE tool will be installed in the university’s state-of-the-art clean rooms at the Central Technology Laboratory, Philipps-University Marburg, Material Sciences Center.
Dr. Wolfgang Stolz, Head of Central Technology Laboratory, Philipps-University Marburg, Material Sciences Center, comments, “We have good experience with AIXTRON equipment because of the MOVPE tools installed earlier in our laboratory. These have enabled us to deliver world-class results over a range of materials and devices. So we are now very much looking forward to the special new system which will be used for another research project funded by the BMBF*. This collaboration will bring together several industry and research institutions with the aim of exploring diode lasers fabricated from a new Ga(NAsP)** material system deposited on silicon aiming for monolithically integrating lasers and Si-based microelectronics for next-generation data communications. In addition, this novel material system will become very important for high efficiency III/V-solar cells on silicon”.
Dr. Rainer Beccard, Director of Marketing at AIXTRON, adds, ”We are very excited about this CRIUS® MOVPE system which is the first one providing 300mm capability for GaAs and other III/V based processes. In addition to the laser-on-silicon integration this type of equipment will play a very important role in the future, in particular when looking at applications like III/V on silicon for CMOS.”