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Axcelis Wins Order For New Optima HD High Dose Implanter From Major Memory Chipmaker

May 8 2006

Axcelis Technologies has received an order for its Optima HD high dose implanter from one of the world's largest manufacturers of memory devices. The newest tool in Axcelis' Optima ion implant family, the Optima HD is the industry's only implanter that addresses traditional high dose implants as well as an expanding range of applications that include molecular and hydrogen implants. The system will ship to Asia during the second quarter of 2006.

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"Axcelis has a very strong partnership with this chipmaker and we're excited to expand our technology relationship even further with this new order," said Mary Puma, chairman and CEO of Axcelis. "The flexibility of the Optima HD was a key advantage that our customer valued when making their decision. Its ability to perform conventional high dose implants today, along with unmatched extendibility for future device manufacturing trends, including dual poly gate and hydrogen applications, made the Optima HD the most logical choice."

The Optima HD covers all traditional high dose implants while providing significant mid dose applications overlap for maximum versatility and capital efficiency. The Optima HD delivers precise implants using Axcelis' advanced spot beam technology, resulting in exceptional implant uniformity and repeatability. Axcelis' proprietary RadiusScanTM endstation further enhances productivity and enables the system to cover an extremely broad dose range.

http://www.axcelis.com/

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