Aviza Technology, Inc., a supplier of advanced semiconductor equipment and process technologies for the global semiconductor, compound semiconductor, nanotechnology and other related markets, today announced that leading Taiwanese foundry Inotera Memories, Inc. has placed an order for multiple RVP-300plus(TM) systems. The tools are slated for installation as part of Inotera's Fab 2 capacity expansion. Inotera will be using the systems for trench DRAM applications at the 90 nm and next-generation technology nodes.
"Aviza has been an important supplier to Inotera since we opened Fab 1," said David Liu, Senior Vice President of Production at Inotera Memories, Inc. "After carefully evaluating thermal processing system suppliers for our Fab 2 expansion, we elected to choose Aviza for many thermal applications because of the success of service and support during our Fab 1 ramp and their ability to meet our stringent volume manufacturing requirements."
The RVP-300plus is a production-proven 300-mm furnace known for best on-wafer results, combining superior productivity with a full complement of atmospheric diffusion and low pressure chemical vapor deposition (LPCVD) process solutions. The system offers optimum thermal budget control by employing features such as fast temperature ramp-up and cool-down capability, which results in uniform chemical deposition and temperature control across the wafer. In addition, the RVP-300plus leverages a dual-boat configuration resulting in increased throughput.
"Aviza continues to successfully strengthen its global position in the thermal processing market," said May Su, Vice President and General Manager, Thermal Business Unit of Aviza Technology, Inc. "This latest multiple system order from Inotera as well as other recent RVP-300plus orders demonstrates the continued momentum for this product worldwide. We are pleased that Inotera has selected Aviza's RVP-300plus systems for their Fab 2 capacity expansion plans."