Posted in | Nanomaterials

Indentation University Session 14: How to Test 40 nm DLC Coatings on Silicon

Session 14 of the KLA Instruments Indentation University series includes a practical demonstration of how to measure DLC coatings using nanoindentation.

About this Webinar

Session 14 starts with a brief overview of the importance and usage of diamond-like carbon (DLC) coatings. A review of the common hardness test method includes instrument configuration (including selection of area function, use of the ISO 14577 Test Method, and determination of load setting), and sample preparation, which is not trivial for DLC coatings. Measurement results are reviewed and discussed.

Note: for Session 14, it is recommended to view the following Indentation University webinars as background for the discussion:

If you attend this Indentation University webinar, you will:

  • Learn about the utility of DLC coatings
  • Get tips on sample preparation techniques, specifically for DLC coatings
  • Learn about the ISO 14577 test method for nanoindentation
  • Learn how to measure DLC coatings using the iMicro nanoindenter
  • Understand how to get the area function and to determine an appropriate test load for DLC coatings
  • Review data from measurements of DLC coatings

About the Speaker

Jennifer Hay, Senior Applications Scientist, KLA Instruments

Formerly a Senior Applications Engineer for KLA Instruments, Jennifer Hay specializes in nanoindentation. Prior to joining KLA, she held similar positions at Nanomechanics, Keysight, Agilent, and MTS Systems Corporation. 

Jennifer has worked in nanoindentation for around 30 years, advancing standardization while also developing methodology for new applications, including thin films, polymers, gels, and biomaterials. 

Jennifer served as chair of the MEMS/Nanomechanics technical division of the Society of Experimental Mechanics (SEM), and has authored numerous journal articles on nanoindentation, including an invited feature series in the SEM journal Experimental Techniques.

Who Should Attend

If you are a nanoindenter user interested in measuring diamond-like carbon (DLC) coatings, this webinar is for you.

More Articles From KLA Instruments

ISO 14577 Standardized Nanoindentation

Young’s Modulus and Hardness of Thin Low-k Films Using Nanoindentation

Measuring Substrate-Independent Young’s Modulus of Hard Overcoats for Magnetic Media Using a Nano Indenter

More Products From KLA Instruments

Nano Indenter G200X | Nanoscale Mechanical Measurement Testing

iMicro Nanoindenter | High Quality Material Tester for Dynamic Data Experiments

iNano® Nanoindenter | High Performing Mechanical Characterization for Universities and High Tech Labs

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