The Journal of Vacuum Science
and Technology B is devoted to reports of original research, review articles,
and Critical Review articles. The JVST B has been established to provide a vehicle
for the publication of research dealing with microelectronics and nanometer
of Vacuum Science & Technology offers ground-breaking editorial covering
applications in semiconductors (particularly thin films), plasmas, surfaces
and properties and processing of electronic materials.
readers include engineers, physicists, chemists, material and microelectronic
scientists, technologists and other specialists working in all branches of microelectronic
and thin film materials processing.
of Vacuum Science and Technology B is available online.