Helios 5 DualBeam - Advanced S/TEM and APT sample preparation, subsurface and 3D Characterization

Building upon the industry-leading Helios DualBeam family’s high-performance imaging and analysis capabilities, Thermo Scientific has introduced the Helios 5 DualBeam. It is meticulously designed to satisfy the requirements of material science researchers and engineers for a variety of focused ion beam scanning electron microscopy (FIB-SEM) use cases, even with the most difficult samples.

The Helios 5 DualBeam redefines the standard in high-resolution imaging with high material contrast; easy, rapid, precise, and high-quality sample preparation for S/TEM imaging and atom probe tomography (APT); and high-quality subsurface and 3D characterization.

Additional improvements to the new Helios 5 DualBeam were made to ensure that the system is optimized for a range of manual or automated workflows, building on the established capabilities of the Helios DualBeam family. Among these enhancements are:

  • Greater ease-of-use: For operators of all skill levels, the Helios 5 DualBeam is the most user-friendly DualBeam. Months of operator training can be cut down to a few days. All operators would benefit from the system’s design, enabling the production of reliable, repeatable results on a wide range of complex applications.
  • Increased productivity: By enabling unattended and even overnight operation, the Thermo Scientific AutoTEM 5 and Helios 5 DualBeam software’s enhanced automation capabilities, increased robustness, and stability enhancements can greatly increase the throughput of sample preparation.
  • Improved time to results: Now available on the Helios 5 DualBeam is FLASH, it is a novel approach to image tuning. With traditional microscopes, the microscope must be meticulously adjusted through repeated alignments each time a user needs to capture an image. With the Helios 5 DualBeam, a simple gesture across the screen will activate FLASH. This automatically modifies these parameters. The automatic modifications can greatly increase data quality, improve throughput, and simplify the process of obtaining high-quality pictures.

S/TEM Sample Preparation

The fifth generation of the industry-leading Helios DualBeam family includes the Thermo Scientific Helios 5 DualBeam. It is meticulously crafted to satisfy the demands of scientists and engineers, combining the superior Thermo Scientific Tomahawk Ion Column for quick, simple, and accurate high-quality sample preparation with the cutting-edge Elstar electron column for extremely high-resolution imaging.

The Helios 5 DualBeam is equipped with a suite of cutting-edge technologies, including advanced electron and ion optics, to facilitate consistent and easy high-resolution S/TEM and atom probe tomography (APT) sample preparation. This allows for high-quality subsurface and 3D characterization, even on the most difficult samples.

Key Features

High-Quality Sample Preparation

Site-specific sample preparation for S/TEM and APT analysis utilizing the industry-leading low-voltage performance of the Thermo Scientific Phoenix Ion Column or the high-throughput Thermo Scientific Tomahawk Ion Column.

Shortest Time to Nanoscale Information

Using the best-in-class Thermo Scientific Elstar Electron Column with FLASH and SmartAlign technologies, this column is suitable for users of any experience level.

Complete Sample Information

The contrast obtained from up to six integrated in-column and below-the-lens detectors is sharp, refined, and free of charge.

Rapid Nanoprototyping

Accurate, precise, and rapid milling and depositing of complex structures with critical dimensions of under 10 nm.

Artifact-Free Imaging

Based on integrated sample cleanliness management and specialized imaging modes like DCFI and SmartScan Modes.

Fully Automated

AutoTEM 5 Software is an optional tool that facilitates quick, simple, fully automated, unsupervised, multi-site in situ and ex situ TEM sample preparation and cross-sectioning.

Next-Generation UC+ Monochromator Technology

With the next generation of UC+ monochromator technology, which has a higher current and can achieve sub-nanometer performance at low energies, the user can reveal the smallest details.

3D Analysis

Thermo Scientific Auto Slice & View 5 (AS&V5) Software is an optional tool that provides accurate region-of-interest targeting and high-quality, multi-modal subsurface and 3D information.

Precise Sample Navigation

It is customized to meet specific application requirements thanks to the Thermo Scientific Nav-Cam Camera located inside the chamber, the high stability and accuracy of the 150-mm piezo stage, and the adaptability of the 110-mm stage.


Source: Thermo Fisher Scientific – Electron Microscopy Solutions

    Helios 5 CX Helios 5 UC Helios 5 UX
Ion optics   Tomahawk HT Ion Column with superior high-current performance Phoenix Ion Column with superior high-current and low-voltage performance​
Ion beam current range 1 pA – 100 nA 1 pA – 65 nA
Accelerating voltage range 500 V – 30 kV 500 V – 30 kV
Max. horizontal field width 0.9 mm at beam coincidence point 0.7 mm at beam coincidence point
Minimum source lifetime 1,000 hours 1,000 hours
  Two-stage differential pumping
Time-of-flight (TOF) correction
15-position aperture strip
Two-stage differential pumping
Time-of-flight (TOF) correction
15-position aperture strip
Electron optics Elstar ultra-high-resolution field emission SEM column Elstar extreme high-resolution field emission SEM column
Magnetic immersion objective lens Magnetic immersion objective lens
High-stability Schottky field emission gun to provide stable high-resolution analytical currents High-stability Schottky field emission gun to provide stable high-resolution analytical currents
Electron beam resolution At optimum working distance (WD) 0.6 nm at 30 kV STEM
0.6 nm at 15 kV
1.0 nm at 1 kV
0.9 nm at 1 kV with beam deceleration*
0.6 nm at 30 kV STEM
0.7 nm at 1 kV
1.0 nm at 500 V (ICD)
At coincident point 0.6 nm at 15 kV
1.5 nm at 1 kV with beam deceleration* and DBS*
0.6 nm at 15 kV
1.2 nm at 1 kV
Electron beam parameter space Electron beam current range 0.8 pA to 176 nA 0.8 pA to 100 nA
Accelerating voltage range 200 V – 30 kV 350 V – 30 kV
Landing energy range 20 eV – 30 keV 20 eV – 30 keV
Maximum horizontal field width 2.3 mm at 4 mm WD 2.3 mm at 4 mm WD
Detectors Elstar in-lens SE/BSE detector (TLD-SE, TLD-BSE)
Elstar in-column SE/BSE detector (ICD)*
Elstar in-column BSE detector (MD)*
Everhart-Thornley SE detector (ETD)
IR camera for viewing sample/column
High-performance in-chamber electron and ion detector (ICE) for secondary ions (SI) and electrons (SE)*
Thermo Scientific In-chamber Nav-Cam Camera for sample navigation*
Retractable, low-voltage, high-contrast, directional, solid-state backscatter electron detector (DBS)*
Retractable STEM 3+ detector with BF/ DF/ HAADF segments*
Integrated beam current measurement
Stage and sample Stage Flexible 5-axis motorized stage High-precision five-axis motorized stage with Piezo-driven XYR axis
XY range 110 mm 150 mm
Z range 65 mm 10 mm
Rotation 360 ° (endless) 360 ° (endless)
Tilt range -15 ° to +90 ° -10 ° to +60 °
Max sample height Clearance 85 mm to eucentric point Clearance 55 mm to eucentric point
Max sample weight 500 g in any stage position
Up to 5 kg at 0 ° tilt (some restrictions apply)
500 g (including sample holder)
Max sample size 110 mm with full rotation (larger samples possible with limited rotation) 150 mm with full rotation (larger samples possible with limited rotation)
  Compucentric rotation and tilt Compucentric rotation and tilt

* Available as an option, configuration dependent 

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