Environmental Scanning Electron Microscopy with Prisma E SEM

Among all the instruments in its class, the Thermo Scientific Prisma E Scanning Electron Microscope (SEM) offers the most comprehensive solution, thanks to its sophisticated automation and extensive range of imaging and analytical modalities.

It is perfect for applications that require high resolution, sample flexibility, and an intuitive operator interface, such as industrial research and development, quality control, and failure analysis. The Prisma E SEM succeeds the extremely popular Thermo Scientific Quanta SEM.


The Prisma E SEM stands out due to its exceptional blend of versatile performance, an extensive array of accessories, and the most user-friendly elemental analysis offered by Thermo Scientific ColorSEM. This combination makes the Prisma E SEM the preferred choice for micro-scale imaging and analysis across various industries and fields.

Prisma E Scanning Electron Microscope Features

Elemental Information at the Fingertips

Live composition-based image coloring for intuitive elemental analysis with optional ChemiSEM Technology and integrated energy-dispersive X-Ray spectroscopy (EDS). Users can expedite their work and obtain the most comprehensive sample information thanks to always-on analysis.

Minimize Sample Preparation Time

Low vacuum and ESEM capability allow for charge-free imaging and analysis of nonconductive and/or hydrated specimens.

Excellent Analytical Capabilities

Outstanding analytical capabilities including wavelength-dispersive spectroscopy (WDS), coplanar EDS/EBSD, high-quality charge-free EDS and EBSD in low vacuum, and a chamber that supports three simultaneous EDS detectors and 180° opposite EDS ports.

Excellent Image Quality

Excellent image quality at low vacuum and low kV because of flexible vacuum modes, such as differential pumping via the lens. Simultaneous secondary electron (SE) and backscattered electron (BSE) imaging in every mode of operation.

In-Situ Study of Materials in their Natural State

The environmental SEM (ESEM) mode on the Prisma E SEM allows samples to be scanned even if they are hot, dirty, outgassing or wet.

Easy to Use

Easy to use, intuitive software with user guidance and an undo function means that even novice users can achieve highly effective operation while enabling experts to do their work faster and with fewer mouse clicks.

Prisma E Scanning Electron Microscope Specifications

Source: Thermo Fisher Scientific – Electron Microscopy Solutions

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  • 3.0 nm at 30 kV in high vacuum, low vacuum and ESEM
  • 7.0 nm at 3 kV (BSED, beam decel.)
  • 3.0 nm at kV (SE) at low-vacuum imaging

Standard detectors

  • ETD, low-vacuum SED (LVD), gaseous SED for ESEM mode (GSED), IR camera

Optional detectors

  • Thermo Scientific Nav-Cam+ Camera, DBS, DBS-GAD, ESEM-GAD, STEM 3+, WetSTEM, RGB-CLD, EDS, EBSD, WDS, Raman, EBIC, etc.

ChemiSEM Technology (optional)

  • Live quantitative SEM image coloring is available based on energy-dispersive X-ray spectroscopy (EDS). Point & ID, linescan, region, element maps and accurate Noran quantification are included.

Stage bias (beam deceleration, optional)

  • -4,000 V to +50 V

Low vacuum mode

  • Up to 2,600 Pa (H2O) or 4,000 Pa (N2)


  • 5-axis motorized eucentric stage, 110 x 110 mm2 with a 105° tilt range. Maximum sample weight: 5 kg in un-tilted position.

Standard sample holder

  • Standard multi-sample SEM holder uniquely mounts directly
  • onto the stage, hosts up to 18 standard stubs (⌀ 12 mm), does
  • not require tools to mount a sample


  • 340 mm inside width, 12 ports, three simultaneous EDS detectors possible, two at 180°, coplanar EDS/EBSD orthogonal to the tilt axis of the stage

In situ accessories (optional)

  • Software controlled -20 °C to +60 °C Peltier cold stage
  • Software controlled 1,000 °C low vacuum/ESEM heating stage
  • Software controlled 1,100 °C high vacuum heating stage
  • Software controlled 1,400 °C low vacuum/ESEM heating stage
  • Integrated gas injection: up to 2 units (other accessories may limit number of gas injection systems (GIS) available) for beam-induced deposition of the following materials:
    • Platinum
    • Tungsten
    • Carbon
  • Manipulators
  • Cryo-stage
  • Electrical probing / multi-probing stations

Software options

  • Thermo Scientific Maps Software for automatic large area acquisition using tiling and stitching; correlative work
  • Thermo Scientific AutoScript 4 Software; a Python-based application programming interface
  • Pattern generation software
  • TopoMaps Software for image colorization, image analysis and 3D surface reconstruction

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