Helios 5 PFIB DualBeam - TEM Sample Preparation, 3D Characterization, and Micromachining

For materials science, Thermo Scientific Helios 5 Plasma FIB (PFIB) DualBeam focused ion beam scanning electron microscope, or FIB-SEM, offers unparalleled capabilities for gallium-free sample preparation, large-volume 3D characterization and high precision micromachining.

Key Features

Gallium-Free S/TEM and APT Sample Preparation

Gallium-free, high-quality TEM and APT sample preparation is made possible by the new PFIB column, which offers exceptional performance under all operating conditions and permits 500 V Xe+ final polishing.

Next-Generation 2.5 μA Xenon Plasma FIB Column

Using the newest generation 2.5 μA Xenon Plasma FIB column (PFIB), high throughput and quality statistically relevant 3D characterization, cross-sectioning, and micromachining are achieved.

Sub-Nanometer Performance at Low Energies

The best-in-class Elstar Electron Column and high-current UC+ monochromator technology, which enable sub-nanometer performance at low energies, reveal the smallest details.

Advanced Capabilities

Cutting-edge capabilities for ion and electron beam-induced deposition and etching on FIB/SEM systems using optional Thermo Scientific MultiChem or GIS Gas Delivery Systems.

Short Time to Nanoscale Information

Fastest access to nanoscale data for users of FLASH and SmartAlign technologies, regardless of skill level.

Advanced Automation

Automated multisite in situ and ex-situ TEM sample preparation and cross-sectioning with optional AutoTEM 5 software is the quickest and easiest method.

Multi-Modal Subsurface and 3D Information

Access high-quality, multi-modal subsurface and 3D information with precise targeting of the region of interest with the optional Auto Slice & View 5 (AS&V5) Software.

Complete Sample Information

The most comprehensive sample data was acquired from up to six integrated in-column and below-the-lens detectors with refined, sharp, and charge-free contrast.

Artifact-Free Imaging

Artifact-free imaging based on integrated sample cleanliness management and specialized imaging modes like DCFI and SmartScanTM Modes.

Precise Sample Navigation

The 150 mm Piezo stage's exceptional stability and accuracy, along with the optional in-chamber Nav-Cam, provide precise sample navigation that is customized to meet the needs of each specific application.

Product Specifications

Source: Thermo Fisher Scientific – Electron Microscopy Solutions

  Helios 5 PFIB CXe DualBeam Helios 5 PFIB UXe DualBeam
Electron optics
  • Elstar extreme high-resolution field emission SEM column with:
    • Immersion magnetic objective lens
    • High-stability Schottky field emission gun to provide stable high-resolution analytical currents
    • UC+ monochromator technology
Electron beam resolution
  • At optimum working distance (WD):
    • 0.7 nm at 1 kV
    • 1.0 nm at 500 V (ICD) 
  • At coincident point:
    • 0.6 nm at 15 kV
    • 1.2 nm at 1 kV
Electron beam parameter space
  • Electron beam current range: 0.8 pA to 100 nA
  • Accelerating voltage range: 200 V – 30 kV
  • Landing energy range: 20* eV – 30 keV
  • Maximum horizontal field width: 2.3 mm at 4 mm WD
Ion optics
  • High-performance PFIB column with Inductively Coupled Xe+ Plasma (ICP)
    • Ion beam current range: 1.5 pA to 2.5 µA
    • Accelerating voltage range: 500 V - 30 kV
    • Maximum horizontal field width: 0.9 mm at beam coincidence point 
  • Ion beam resolution at coincident point
    • <20 nm at 30 kV using preferred statistical method
    • <10 nm at 30 kV using selective edge method
  • Elstar in-lens SE/BSE detector (TLD-SE, TLD-BSE)
  • Elstar in-column SE/BSE detector (ICD)*
  • Everhart-Thornley SE detector (ETD)
  • IR camera for viewing sample/column
  • High-performance ion conversion and electron (ICE) detector for secondary ions (SI) and electrons (SE)
  • In-chamber Nav-Cam sample navigation camera*
  • Retractable low voltage, high contrast directional solid-state backscatter electron detector (DBS)*
  • Integrated beam current measurement
Stage and sample

Flexible 5-axis motorized stage:

  • XY range: 110 mm
  • Z range: 65 mm
  • Rotation: 360 ° (endless)
  • Tilt range: -38 ° to +90 °
  • XY repeatability: 3 μm
  • Max sample height: Clearance 85 mm to eucentric point
  • Max sample weight at 0 ° tilt: 5 kg (including sample holder)
  • Max sample size: 110 mm with full rotation (larger samples possible with limited rotation)
  • Compucentric rotation and tilt

High-precision, 5-axis motorized stage with XYR axis, piezo-driven

  • XY range: 150 mm
  • Z range: 10 mm
  • Rotation: 360 ° (endless)
  • Tilt range: -38 ° to +60 °
  • XY repeatability: 1 μm
  • Max sample height: Clearance 55 mm to eucentric point
  • Max sample weight at 0 ° tilt: 500 g (including sample holder)
  • Max sample size: 150 mm with full rotation (larger samples possible with limited rotation)
  • Compucentric rotation and tilt

*Available as an option, configuration dependent

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