Scios 2 DualBeam - Ultra-High Resolution Imaging and 3D Characterization

Excellent sample preparation and 3D characterization capabilities are offered by the Thermo Scientific Scios 2 DualBeam, an ultra-high-resolution analytical focused ion beam scanning electron microscopy (FIB-SEM) system for a variety of samples, including magnetic and non-conductive materials.

The Scios 2 DualBeam is the perfect option for scientists and engineers in advanced research and analysis across governmental, academic, and industrial research environments. This is thanks to its revolutionary features that are designed to boost throughput, precision, and ease of use.

Subsurface Characterization

To gain a deeper understanding of the structure and characteristics of a material, subsurface or 3D characterization is frequently necessary.

The Scios 2 DualBeam and optional Thermo Scientific Auto Slice & View 5 (AS&V5) Software allows for high-quality, fully automated acquisition of multi-modal 3D datasets, such as electron backscatter diffraction (EBSD) for microstructural and crystallographic information, energy-dispersive spectroscopy (EDS) for compositional information, and backscattered electron (BSE) imaging for maximum materials contrast.

The Scios 2 DualBeam provides a unique workflow solution for high-resolution, sophisticated 3D characterization and analysis at the nanoscale scale when combined with Thermo Scientific Avizo Software.

Backscattered Electron and Secondary Electron Imaging

The system's high-resolution imaging and detecting capabilities are based on the ground-breaking NICol electron column. Whether operating at 30 keV in STEM mode (to access structural information) or at lower energies (to gain charge-free, detailed surface information), it provides exceptional nanoscale details under a wide range of working conditions.

The Scios 2 DualBeam is made for the simultaneous acquisition of angular and energy-selective secondary electron (SE) and BSE imaging thanks to its special in-lens Thermo Scientific Trinity Detection System. Rapid access to detailed nanoscale information is feasible not only top-down but also on specimens or coss-sections. 

Optional below-the-lens detectors and an electron-beam-deceleration mode guarantee easy and rapid simultaneous collection of all signaling. This reveals the smallest features in a material cross-section or surface. Results are acquired quickly, precisely, and consistently because of the special NICol column design with full auto alignments.

TEM Sample Preparation

Engineers and scientists must constantly overcome new obstacles that necessitate highly localized characterization of ever-more complicated samples with ever-smaller features. Site-specific high-resolution S/TEM sample preparation (for a variety of materials) can be completed quickly and simply with the Scios 2 DualBeam's state-of-the-art technological innovations and the optional, user-friendly, comprehensive Thermo Scientific AutoTEM 5 Software.

Final polishing with low-energy ions is necessary to reduce surface damage on the sample and produce high-quality results. High-quality TEM lamella can be produced using the Thermo Scientific Sidewinder HT Focused Ion Beam (FIB) column, which provides good low-voltage performance in addition to high-resolution imaging and milling at high voltages.

Key Features

Fast and Easy Preparation

The Sidewinder HT ion column can be used to produce excellent, site-specific TEM and atom probe samples.

The Most Complete Sample Information

With refined, sharp, and charge-free contrast acquired from various integrated in-column and below-the-lens detectors. 

Precise Sample Navigation

The Thermo Scientific Nav-Cam Camera's in-chamber and high flexibility 110 mm stage allow for customization to specific application requirements.

Optimize User Solution

Thanks to the adaptable DualBeam configuration, users can meet individual application requirements. Users can choose a low-vacuum* mode with a chamber pressure of up to 500 Pa.

Ultra-High Resolution Imaging

The industry-leading Thermo Scientific NICol Electron Column offers best-in-class performance on a variety of samples, including nonconductive and magnetic materials.

High-Quality, Multi-Modal Subsurface and 3D Information

With the optional AS&V5 Software, users can access high-quality, multi-modal subsurface and 3D information with precise targeting of the region of interest.

Artifact-Free Imaging and Patterning

Featuring specialized modes like Thermo Scientific SmartScan, DCFI, and drift suppression modes. 


Source: Thermo Fisher Scientific – Electron Microscopy Solutions

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Electron beam resolution
  • Optimum WD
    • 0.7 nm at 30 keV STEM
    • 1.4 nm at 1 keV
    • 1.2 nm at 1 keV with beam deceleration
Electron beam parameter space
  • Beam current range: 1 pA to 400 nA
  • Landing energy range: 20* eV – 30 keV
  • Accelerating voltage range: 200 V – 30 kV
  • Maximum horizontal field width: 3.0 mm at 7 mm WD and 7.0 mm at 60 mm WD
  • Extra wide field of view available through standard navigation montage
Ion optics
  • Acceleration voltage: 500 V – 30 kV
  • Beam current range: 1.5 pA – 65 nA
  • 15-position aperture strip
  • Drift suppression mode as standard for non-conductive samples
  • Minimum source lifetime: 1,000 hours
  • Ion beam resolution: 3.0 nm at 30 kV using selective edge method
  • Trinity Detection System (in-lens and in-column)
    • T1 segmented lower in-lens detector
    • T2 upper in-lens detector
    • T3 retractable in-column detector (Optional)
    • Up to four simultaneously detected signals
  • Everhart-Thornley SE Detector (ETD)
  • High-performance ion conversion and electron (ICE) detector for secondary ions (SI) and electrons (SE) (Optional)
  • Retractable low-voltage, high-contrast, segmented solid-state backscatter electron detector (DBS) (Optional)
  • Retractable STEM 3+ detector with BF/ DF/ HAADF segments (Optional)
  • IR camera for viewing sample and chamber
  • In-chamber Nav-Cam sample navigation camera (Optional)
  • Integrated beam current measurement
Stage and sample

Flexible 5-axis motorized stage:

  • XY range: 110 mm
  • Z range: 65 mm
  • Rotation: 360 ° (endless)
  • Tilt range: -15 ° to +90 °
  • XY repeatability: 3 μm
  • Max sample height: Clearance 85 mm to eucentric point
  • Max sample weight at 0 ° tilt: 5 kg (including sample holder)
  • Max sample size: 110 mm with full rotation (larger sample possible with limited rotation)
  • Compucentric rotation and tilt

* Available as an option, configuration dependent 

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