MicroSense, LLC today announced installation of a full suite of STT-MRAM magnetic metrology tools at a leading edge semiconductor manufacturer. These metrology systems characterize the magnetic properties of multi-layer 300 mm wafers or coupons used in the development and manufacturing of Perpendicular and In-Plane STT-MRAM (Spin-Transfer-Torque Magneto-resistive Random Access Memory).
The MicroSense Polar Kerr MRAM metrology system is a 300mm wafer ready, magnetic measurement tool for STT-MRAM production. This metrology system characterizes the magnetic properties of multi-layer wafers, performing automated non-contact mapping of the magnetic properties of perpendicular MRAM wafers. (PRNewsFoto/MicroSense, LLC)
"Although we've received multiple individual orders for our various MRAM metrology systems from chip manufacturers and research institutes, we are pleased that a major customer ordered a full suite of our tools to use in their STT-MRAM program" said Tom McNabb, President and COO of MicroSense. "This full suite includes our Polar Kerr system for 200mm or 300mm Perpendicular STT-MRAM wafers and our KerrMapper tool for 200mm or 300mm In-plane STT-MRAM wafers. Our EZ Vibrating Sample Magnetometer measures sample coupons from Perpendicular or In-Plane STT-MRAM wafers. We believe these are critical enabling metrology tools for our customers as STT-MRAM appears to be building momentum as a next generation, non-volatile, scalable memory."
"Our magnetic measurement systems provide critical process control information, to improve yield on multi-layer magnetic stacks that are an essential component of STT-MRAM fabrication", said Ferenc Vajda, Ph.D., Director of Magnetic Metrology at MicroSense. "These metrology systems utilize our 30 years of proprietary technologies in system design, magnetic field control and complex algorithms that result in world leading performance. Our systems can measure wafers up to 300 mm and are applicable to both R&D and production needs. Systems are available in manual-loading or fully-automated configurations."
About MicroSense, LLC
MicroSense is a worldwide leader in high sensitivity automated magnetic measurement systems, including Vibrating Sample Magnetometers, which are utilized in critical metrology applications, such as hard disk drive disks & read/write head wafers, semiconductor wafers, and fundamental magnetic material characterization. Leading data storage and semiconductor equipment manufacturers, as well as universities and research institutes around the world have used and trusted magnetic metrology systems from MicroSense for over 30 years.
Source: http://www.microsense.net/