Compact SIMS: Design Breakthrough for Surface Analysis

The Hiden Compact SIMS tool is capable of rapid and simple characterisation of layer structures, surface contamination and impurities with sensitive detection of positive ions being assisted by the oxygen primary ion beam and provides isotopic sensitivity across the entire periodic table.

A rotary carousel enables ten samples to be loaded at the same time for measurement into the dry-pumped vacuum chamber. The tool has a small footprint and is very easy to use.

The ion gun geometry set is suitable for nanometre depth resolution and near surface testing. The tool has a control software and ion gun system similar to the fully featured Hiden SIMS Workstation family, thereby capable of providing depth profiles, mass spectral data, and 3D and 2D images.

The MAXIM-600P detector is based around the highly dependable Hiden 6mm triple quadrupole mass filter with pulse ion detection. An electron gun (optional) is available for analysis of insulating samples.

The Compact SIMS has an SNMS unit that is useful for quantification of high concentration elements e.g., alloys.

Key Features

The main features of the Hiden Compact SIMS tool are given below:

  • Mass spectra
  • Small footprint
  • Depth profiling
  • Isotopic analysis
  • Easy user friendly layout
  • Wheeled trolley design
  • Positive SIMS and SNMS
  • 3D characterisation and imaging
  • Analysis on the nanometre scale
  • Requires only single phase electrical power (under 10A)


The main applications of the Hiden Compact SIMS tool are as follows:

  • Glass coatings
  • Solar cells
  • Metallic thin films

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